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  3. Vacuum Valves
  4. Realizes miniaturization with simple component configuration Square gate valve Rollcam Gate Valve (V-Tex Co., Ltd.)
Realizes miniaturization with simple component configuration Square gate valve Rollcam Gate Valve-Rollcam Gate Valve
Realizes miniaturization with simple component configuration Square gate valve Rollcam Gate Valve-V-Tex Co., Ltd.

Realizes miniaturization with simple component configuration Square gate valve Rollcam Gate Valve
V-Tex Co., Ltd.

About This Product

We can accommodate everything from standard 200mm and 300mm wafers to G8 and G10.5 glass substrates, as well as non-standard sizes, and any connection specifications. Based on our extensive experience, V-Tex can manufacture customized products from small lots to meet customer needs. About V-Tex square gate valve

■Features

・There are no metal-on-metal sliding parts inside the valve, which creates a vacuum. ・Compact and space-saving design due to its simple and minimum number of parts. ・Since the valve body sealing surface is vertical, the risk of foreign objects getting caught is minimized. ・The standard specification is a highly durable and maintenance-free design that can operate up to 1 million times. ・An O-ring is standard for the valve body seal. Contributes to cost reduction.

■Usage example of square gate valve

- Installed at the workpiece entrance/exit of the vacuum chamber. ・Square gate valve: Used as an entrance and exit for workpieces (wafers, glass substrates, etc.) and as a partition between the atmosphere and chambers and between chambers.

■Rollcam Gate Valve

・Non-sliding structure inside the vacuum: No grease inside the vacuum, particle-free ・Any opening size ・Connection size: We can respond to requests larger or smaller than the semiconductor 200m/300mm size. ・Selectable pressure specifications: We provide the optimal drive unit for each door, positive pressure, and reverse pressure.

  • Product

    Realizes miniaturization with simple component configuration Square gate valve Rollcam Gate Valve

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1 Models of Realizes miniaturization with simple component configuration Square gate valve Rollcam Gate Valve

Image Part Number Price (excluding tax) Opening/closing time Material Operating pressure Lifespan Operating temperature Leak amount Option
Realizes miniaturization with simple component configuration Square gate valve Rollcam Gate Valve-Part Number-Rollcam Gate Valve

Rollcam Gate Valve

Available upon quote

1.0-3.0s

Body: Aluminum A5052
Valve body: Aluminum A5052
Sealing material: FKM
Bellows: AM350

0.45-0.55MPa

1 million times

Main body/valve body: 90℃
Actuator：60℃

Main body: 4.0×10-11 [pa・m3/s]
Valve body: 1.3×10-10 [pa・m3/s]

Change of main body and valve body material
Changing the mounting direction
Addition of water cooling mechanism (main body/valve body)
Addition of heating specifications (main body/valve body)
Change of open/close detection switch
Addition of surface treatment

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About Company Handling This Product

V-Tex Co., Ltd.

  • Japan

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Vacuum Valves
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