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  3. Vacuum Gate Valves
  4. Achieving miniaturization with simple component configuration Square gate valve Gate valve T-Motion (V-Tex Co., Ltd.)
Achieving miniaturization with simple component configuration Square gate valve Gate valve T-Motion-Gate valve T-Motion
Achieving miniaturization with simple component configuration Square gate valve Gate valve T-Motion-V-Tex Co., Ltd.

Achieving miniaturization with simple component configuration Square gate valve Gate valve T-Motion
V-Tex Co., Ltd.

About This Product

We can accommodate everything from standard 200mm and 300mm wafers to G8 and G10.5 glass substrates, as well as non-standard sizes, and any connection specifications. Based on our extensive experience, V-Tex can manufacture customized products from small lots to meet customer needs. About V-Tex square gate valve

■Features

・There are no metal-on-metal sliding parts inside the valve, which creates a vacuum. ・Compact and space-saving design due to its simple and minimum number of parts. ・Since the valve body sealing surface is vertical, the risk of foreign objects getting caught is minimized. ・The standard specification is a highly durable and maintenance-free design that can operate up to 1 million times. ・An O-ring is standard for the valve body seal. Contributes to cost reduction.

■Usage example of square gate valve

- Installed at the workpiece entrance/exit of the vacuum chamber. ・Square gate valve: Used as an entrance and exit for workpieces (wafers, glass substrates, etc.) and as a partition between the atmosphere and chambers and between chambers.

■Gate valve T-Motion

- Compatible with increasingly large FPD boards (G11). ・Low vibration: Unique valve motion achieves low vibration without reducing opening/closing speed. 40% reduction compared to conventional models. ・Low particles: The guide mechanism of the valve body is all placed on the atmosphere side, achieving no sliding during both vertical and horizontal conveyance. ・Low price: Achieved low price by standardizing parts beyond valve size. 20% reduction compared to conventional models. ・BEST Match for all generations: Can be set as desired by equipment designers without restrictions on valve size (width x height).

  • Product

    Achieving miniaturization with simple component configuration Square gate valve Gate valve T-Motion

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1 Models of Achieving miniaturization with simple component configuration Square gate valve Gate valve T-Motion

Image Part Number Price (excluding tax) Opening/closing time Material Operating pressure Lifespan Compatible generation Control unit Operating temperature Leak amount Option
Achieving miniaturization with simple component configuration Square gate valve Gate valve T-Motion-Part Number-Gate valve T-Motion

Gate valve T-Motion

Available upon quote

1.0 – 3.0

Body: Aluminum
Valve body: aluminum
Sealing material: FKM
Bellows: AM350

0.45-0.55MPa

1 million times

G6-G11

Equipped with VTEX original unit

Main body/valve body: 90℃
Actuator：60℃

Main body: 4.0×10-11 [pa・m3/s]
Valve body: 1.3×10-10 [pa・m3/s]

Change of seal material
Addition of surface treatment

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About Company Handling This Product

V-Tex Co., Ltd.

  • Japan

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