Compact round gate valve Pendroll valve APC
V-Tex Co., Ltd.
About This Product
Compatible with ISO/JIS flange standards. We have a lineup of three types to suit your application and process.
■APC
Pressure control valve with adjustable conductance down to 0. Compatible size: 160A to 350A
About V-Tex Pendroll valve
■IPV/3PV/APC type (common)
- Operates reliably with one action.
- Compact and space-saving design due to its simple and minimum number of parts.
・The standard specification is a highly durable and maintenance-free design that can perform FullClose/FullOpen operations up to 500,000 times (200,000 times for APC).
・An O-ring is standard for the valve body seal. Contributes to cost reduction.
・The valve body can be removed with one bolt.
■Characteristics of APC type
・The dedicated controller is equipped with a learn function that calculates the optimal parameters for the chamber volume.
・Accurate pressure control and position control are possible with high-speed control.
・Up to 2 pressure sensors can be connected.
- Zero conductance control is possible.
・Pressure control is possible even with a small gas flow rate during low vacuum control.
- Gas is not exhausted during zero conductance, saving valuable process gas.
■Usage example of Pendroll valve
Installed as an exhaust system valve between the vacuum chamber and exhaust pump. IPV is used for load lock chambers and transfer chambers. The process chamber uses 3PV to maintain a constant conductance and APC to maintain a constant fluctuating pressure.
■Simulation
If you tell us the chamber capacity, gas flow rate, target pressure, and pumping speed, we can simulate even without a chamber. (Patent No. 5424721)
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Product
Compact round gate valve Pendroll valve APC
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Handling Company
V-Tex Co., Ltd.
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Categories
1 Models of Compact round gate valve Pendroll valve APC
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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APC |
Available upon quote |
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About Company Handling This Product
- Japan