Compatible with ISO/JIS flange standards. We have a lineup of three types to suit your application and process.
■3PV
Due to conductance adjustment, it can be stopped at an intermediate position between FULL OPEN and FULL CLOSE. Compatible size: 160A to 500A
■About V-Tex Pendroll valve IPV/3PV/APC types (common)
- Operates reliably with one action.
- Compact and space-saving design due to its simple and minimum number of parts.
・The standard specification is a highly durable and maintenance-free design that can perform FullClose/FullOpen operations up to 500,000 times (200,000 times for APC).
・An O-ring is standard for the valve body seal. Contributes to cost reduction.
・The valve body can be removed with one bolt.
■Usage example of Pendroll valve
Installed as an exhaust system valve between the vacuum chamber and exhaust pump. IPV is used for load lock chambers and transfer chambers. The process chamber uses 3PV to maintain a constant conductance and APC to maintain a constant fluctuating pressure.
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