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  3. Vacuum Gate Valves
  4. Compact round gate valve Pendroll valve 3PV (V-Tex Co., Ltd.)
Compact round gate valve Pendroll valve 3PV-3PV
Compact round gate valve Pendroll valve 3PV-V-Tex Co., Ltd.

Compact round gate valve Pendroll valve 3PV
V-Tex Co., Ltd.

About This Product

Compatible with ISO/JIS flange standards. We have a lineup of three types to suit your application and process.

■3PV

Due to conductance adjustment, it can be stopped at an intermediate position between FULL OPEN and FULL CLOSE. Compatible size: 160A to 500A

■About V-Tex Pendroll valve IPV/3PV/APC types (common)

- Operates reliably with one action. - Compact and space-saving design due to its simple and minimum number of parts. ・The standard specification is a highly durable and maintenance-free design that can perform FullClose/FullOpen operations up to 500,000 times (200,000 times for APC). ・An O-ring is standard for the valve body seal. Contributes to cost reduction. ・The valve body can be removed with one bolt.

■Usage example of Pendroll valve

Installed as an exhaust system valve between the vacuum chamber and exhaust pump. IPV is used for load lock chambers and transfer chambers. The process chamber uses 3PV to maintain a constant conductance and APC to maintain a constant fluctuating pressure.

  • Product

    Compact round gate valve Pendroll valve 3PV

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1 Models of Compact round gate valve Pendroll valve 3PV

Image Part Number Price (excluding tax) Operating pressure Compatible caliber Warranty period Operating temperature Valve life He leakage amount (for seal material FKM)
Compact round gate valve Pendroll valve 3PV-Part Number-3PV

3PV

Available upon quote

0.5MPa

160~500A

12 months

90℃ (drive part: 60℃)

Opening/closing: 500,000 times
*400A: 150,000 times
*500A: 100,000 times
(*The lifespan can be extended to 300,000 cycles as an option.)

Valve body: 1.3×10-^10[Pa・m^3/s]
External (main body): 4.0×10-^10[Pa・m^3/s]

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V-Tex Co., Ltd.

  • Japan

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