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  2. Obtain clear EBIC images with 18-bit resolution. Failure analysis of semiconductor devices. EBIC/EBAC imaging system (Tokyo Instruments, Inc)
Obtain clear EBIC images with 18-bit resolution. Failure analysis of semiconductor devices. EBIC/EBAC imaging system-EBIC/EBAC imaging system
Obtain clear EBIC images with 18-bit resolution. Failure analysis of semiconductor devices. EBIC/EBAC imaging system-Tokyo Instruments, Inc

Obtain clear EBIC images with 18-bit resolution. Failure analysis of semiconductor devices. EBIC/EBAC imaging system
Tokyo Instruments, Inc

About This Product

■Summary

This device is combined with an existing scanning electron microscope (SEM) to measure EBIC (Electron Beam Induced Current) obtained by irradiating a sample or device with an electron beam, and detect crystal defects and defects in semiconductor materials. Local electrical characteristics of devices can be evaluated. This induced current decreases at defective locations in the material, so defects are identified as dark contrast, and the location of the defect can be identified by comparing it with the SEM image.

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    Obtain clear EBIC images with 18-bit resolution. Failure analysis of semiconductor devices. EBIC/EBAC imaging system

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1 Models of Obtain clear EBIC images with 18-bit resolution. Failure analysis of semiconductor devices. EBIC/EBAC imaging system

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Obtain clear EBIC images with 18-bit resolution. Failure analysis of semiconductor devices. EBIC/EBAC imaging system-Part Number-EBIC/EBAC imaging system

EBIC/EBAC imaging system

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About Company Handling This Product

Tokyo Instruments, Inc

Company Overview

Tokyo Instruments, Inc., established in 1981, and headquartered in Tokyo, Japan, is a manufacturer of opto-ele...

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