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  4. Various SPM calibrations and SPM probe evaluations. PTB-traceable gratings are also available. SPM grating (Tokyo Instruments, Inc)
Various SPM calibrations and SPM probe evaluations. PTB-traceable gratings are also available. SPM grating-TGZ1
Various SPM calibrations and SPM probe evaluations. PTB-traceable gratings are also available. SPM grating-Tokyo Instruments, Inc

Various SPM calibrations and SPM probe evaluations. PTB-traceable gratings are also available. SPM grating
Tokyo Instruments, Inc

Tokyo Instruments, Inc's Response Status

Response Rate

100.0%

Response Time

30.7hours

Relatively Fast Response

About This Product

■Summary

This is a grating for SPM calibration. You can choose the most suitable one according to your application. It can also be used for SPM measurement practice, student experiments, etc.

■Features

A long grating with repeated bumps used for Z-axis calibration and nonlinearity detection. You can choose from 5 different sizes.

■Applications

・Z-axis calibration ・Nonlinearity detection

  • Product

    Various SPM calibrations and SPM probe evaluations. PTB-traceable gratings are also available. SPM grating

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1 Models of Various SPM calibrations and SPM probe evaluations. PTB-traceable gratings are also available. SPM grating

Image Part Number Price (excluding tax) Structure Effective range Forming pattern Period Chip size Step height
Various SPM calibrations and SPM probe evaluations. PTB-traceable gratings are also available. SPM grating-Part Number-TGZ1

TGZ1

Available upon quote

Formed on top of SiO2 layer on silicon wafer

3×3 (center) mm

1- D (Z-axis direction)

3±0.05μm

5×5×0.5mm

21.6±1.5nm

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About Company Handling This Product

Tokyo Instruments, Inc

Response Rate

100.0%

Response Time

30.7hrs

Company Overview

Tokyo Instruments, Inc., established in 1981, and headquartered in Tokyo, Japan, is a manufacturer of opto-ele...

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  • Japan

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Diffraction Grating
Diffraction Grating　Tokyo Instruments, Inc
Tokyo Instruments, Inc

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