Ultra-low concentration gas analyzer HALO3 series HALO KA H2O (Ultra-low concentration measurement model)
Tokyo Instruments, Inc
About This Product
■Summary
TigerOptics' HALO3 series is a gas analyzer that uses cavity ring-down spectroscopy (CRDS) to measure the concentration of specific gas molecules in sample gas with ultra-high sensitivity at the ppt level.
Compared to conventional gas molecule concentration measurement methods, this method has the advantages of not requiring calibration using standard gases, high accuracy and reliability, and fast response speed. The device is a one-box type and has excellent portability.
■Features
・NIST compliant
・Fast response, high sensitivity, high precision, high reliability
・Easy operation・Maintenance free
・Compact one box type
・Highly sensitive measurement of trace molecular concentrations such as H2O, CO, CO2, CH4, HF, etc. in sample gas
・Wide measurement concentration range (H2O concentration in N2 gas: 400ppt to 20ppm, HALO KA H2O)
・Ethernet ・Isolated 4mA to 20mA output ・RS-232 compatible
■Applications
・Measurement and management of trace gas concentrations
・Gas monitoring during semiconductor manufacturing process
・Research and development of humidity measurement and humidity standards
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Product
Ultra-low concentration gas analyzer HALO3 series HALO KA H2O (Ultra-low concentration measurement model)
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Handling Company
Tokyo Instruments, Inc
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Categories
1 Models of Ultra-low concentration gas analyzer HALO3 series HALO KA H2O (Ultra-low concentration measurement model)
| Product Image | Part Number | Price (excluding tax) | Accuracy | Accuracy (1σ) | Concentration measurement range | Minimum detection limit (LDL) | Operating temperature | Response speed | Sensitivity (3σ) | Storage temperature |
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HALO KA H2O (Ultra low concentration measurement model) |
Available upon quote | ±4% or 1/2 of the minimum detection limit (whichever is greater) | ±0.75% or 1/3 of sensitivity (whichever is greater) | 0~20 ppm | 200~400 ppt | 10~40℃, humidity 30~80%RH (no condensation) | <3 minutes (95% response) | 60~300ppt | -10~50℃ |
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About Company Handling This Product
- Japan