Product
Mechanics High-precision thin piezo stage 3-axis piezo stage series/BIO3/LT3Handling Company
Tokyo Instruments, IncCategories
Product Image | Part Number | Price (excluding tax) | Adaptive controller | BIO3 size W×L×H | Body material | Cable length | LT3 size W×L×H | Linearity (typical) | Load capacity - when used horizontally | Load capacity - when used vertically | Resonant frequency X, Y, Z | Sensor | Stiffness X, Y, Z | XYZ noise level | XYZ position repeatability | XYZ resolution | XYZ stroke |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
BIO3/LT3.100 |
Available upon quote | Standard | 152.5×213×20.45mm | Al or Invar | 2m | 152.5×193×20.70mm | 0.02% | 1kg | 0.5kg | 500Hz, 400Hz, 400Hz | Silicon HR sensor | 0.6N/μm, 0.5N/μm, 0.5N/μm | 0.01nm | 0.2nm | 0.1nm | 100μm |