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  2. Chemical liquid equipment Suckback valve AMS (CKD)
Chemical liquid equipment Suckback valve AMS-AMS
Chemical liquid equipment Suckback valve AMS-CKD

Chemical liquid equipment Suckback valve AMS
CKD

About This Product

■Summary

The compact structure allows for reliable liquid drainage and high precision control of suckback. It can be used to prevent problems such as poor chemical discharge to wafers. Optimized custom designs depending on fluid viscosity are available.

■Preventing fluid from dripping

Optimal liquid drain can be adjusted by combining with a slow speed type speed controller.

■Operating principle

When fluid is flowing, air pressure is applied to the operating port to lower the diaphragm. When the fluid is stopped, air from the operating port is released to the atmosphere, and the force of the spring raises the diaphragm, increasing the volume inside the suck valve and preventing fluid from dripping.

  • Product

    Chemical liquid equipment Suckback valve AMS

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1 Models of Chemical liquid equipment Suckback valve AMS

Image Part Number Price (excluding tax)
Chemical liquid equipment Suckback valve AMS-Part Number-AMS

AMS

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About Company Handling This Product

CKD

Company Overview

CKD Corporation, established in 1943 under the name of Japan Aircraft Electric Co., Ltd., is a Japanese manufa...

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  • Japan

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