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High frequency power supply auto matching box, etc. 13.56MHz high frequency power supply-HFS-013-0005C
High frequency power supply auto matching box, etc. 13.56MHz high frequency power supply-Japan Koshuha Co., Ltd.

High frequency power supply auto matching box, etc. 13.56MHz high frequency power supply
Japan Koshuha Co., Ltd.


About This Product

This is an all solid state high frequency power supply for plasma generation for semiconductor manufacturing equipment and liquid crystal manufacturing equipment. The oscillator uses a crystal oscillation method, and is designed to be compact and highly reliable.

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    High frequency power supply auto matching box, etc. 13.56MHz high frequency power supply

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1 Models of High frequency power supply auto matching box, etc. 13.56MHz high frequency power supply

Image Part Number Price (excluding tax) Harmonics Power supply dimensions Height Power supply body dimensions Width Power supply body dimensions depth Power protection function Mass (power supply only) Reflected power resistance Oscillation frequency Maximum rated output Required power 50/60Hz Ambient temperature/humidity Output power stability Output ripple Output connector/cable Output impedance Cooling method
High frequency power supply auto matching box, etc. 13.56MHz high frequency power supply-Part Number-HFS-013-0005C

HFS-013-0005C

Available upon quote

-30dB or less relative to the fundamental wave

99mm

240mm

400mm

Circuit protector, overvoltage/overcurrent limiter, reflection (Pr) limiter, temperature detection

Approximately 5kg

50W

13.56MHz ±0.05%

50W

AC100V
1φ, 120VA

10~30℃/30~80% without condensation

Within ±1% of maximum power for ±10% fluctuation of power supply voltage (when ambient temperature is 25°C and dummy load is used)

1% or less

BNC

50Ω

Forced air cooling

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