High frequency power supply auto matching box, etc. 13.56MHz high frequency power supply
Japan Koshuha Co., Ltd.
About This Product
This is an all solid state high frequency power supply for plasma generation for semiconductor manufacturing equipment and liquid crystal manufacturing equipment. The oscillator uses a crystal oscillation method, and is designed to be compact and highly reliable.
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Product
High frequency power supply auto matching box, etc. 13.56MHz high frequency power supply
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Handling Company
Japan Koshuha Co., Ltd.
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Categories
1 Models of High frequency power supply auto matching box, etc. 13.56MHz high frequency power supply
| Product Image | Part Number | Price (excluding tax) | Ambient temperature/humidity | Cooling method | Harmonics | Mass (power supply only) | Maximum rated output | Oscillation frequency | Output connector/cable | Output impedance | Output power stability | Output ripple | Power protection function | Power supply body dimensions Width | Power supply body dimensions depth | Power supply dimensions Height | Reflected power resistance | Required power 50/60Hz |
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HFS-013-0005C |
Available upon quote | 10~30℃/30~80% without condensation | Forced air cooling | -30dB or less relative to the fundamental wave | Approximately 5kg | 50W | 13.56MHz ±0.05% | BNC | 50Ω | Within ±1% of maximum power for ±10% fluctuation of power supply voltage (when ambient temperature is 25°C and dummy load is used) | 1% or less | Circuit protector, overvoltage/overcurrent limiter, reflection (Pr) limiter, temperature detection | 240mm | 400mm | 99mm | 50W |
AC100V 1φ, 120VA |
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About Company Handling This Product
- Japan