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High frequency power supply auto matching box, etc. MF band (400KHz, 800kHz, 2MHz) High frequency power supply-HFS-04-010W
High frequency power supply auto matching box, etc. MF band (400KHz, 800kHz, 2MHz) High frequency power supply-Japan Koshuha Co., Ltd.

High frequency power supply auto matching box, etc. MF band (400KHz, 800kHz, 2MHz) High frequency power supply
Japan Koshuha Co., Ltd.


About This Product

This is an all solid state high frequency power supply for plasma generation for semiconductor manufacturing equipment and liquid crystal manufacturing equipment. The oscillator uses a crystal oscillation method, and is designed to be compact and highly reliable.

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    High frequency power supply auto matching box, etc. MF band (400KHz, 800kHz, 2MHz) High frequency power supply

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1 Models of High frequency power supply auto matching box, etc. MF band (400KHz, 800kHz, 2MHz) High frequency power supply

Image Part Number Price (excluding tax) Harmonic distortion Power supply mass Power supply body dimensions (mm) Height Power supply body dimensions (mm) Width Power supply body dimensions (mm) Depth Power protection function Reflected power resistance Oscillation frequency Maximum rated output Operation method (separate control panel) Required power AC200V 50/60Hz Required amount of cooling water Ambient temperature/humidity Output power stability Output ripple Output connector Output cable Output impedance Cooling water temperature/pressure/water quality Cooling method
High frequency power supply auto matching box, etc. MF band (400KHz, 800kHz, 2MHz) High frequency power supply-Part Number-HFS-04-010W

HFS-04-010W

Available upon quote

-40dB or less (at maximum output)

Approximately 30kg

200

480

450

Circuit protector, overvoltage/eddy current limiter, reflection limiter

200W

400kHz±0.05%

1kW

Local and remote operation

3φ/3kVA

4L/min or more

10~30℃, 30~80%, but no condensation

When the power supply voltage fluctuation is ±10%, within ±1% of the maximum output (when the ambient temperature is 25°C and a dummy load is used)

1% or less (at maximum output)

N type

8D-2V

50Ω

10~30℃, 0.5MPa or less, 3~5kΩ-cm

Water cooling

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