High frequency power supply auto matching box, etc. MF band (400KHz, 800kHz, 2MHz) High frequency power supply
Japan Koshuha Co., Ltd.
About This Product
This is an all solid state high frequency power supply for plasma generation for semiconductor manufacturing equipment and liquid crystal manufacturing equipment. The oscillator uses a crystal oscillation method, and is designed to be compact and highly reliable.
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Product
High frequency power supply auto matching box, etc. MF band (400KHz, 800kHz, 2MHz) High frequency power supply
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Handling Company
Japan Koshuha Co., Ltd.
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Categories
1 Models of High frequency power supply auto matching box, etc. MF band (400KHz, 800kHz, 2MHz) High frequency power supply
| Product Image | Part Number | Price (excluding tax) | Ambient temperature/humidity | Cooling method | Cooling water temperature/pressure/water quality | Harmonic distortion | Maximum rated output | Operation method (separate control panel) | Oscillation frequency | Output cable | Output connector | Output impedance | Output power stability | Output ripple | Power protection function | Power supply body dimensions (mm) Depth | Power supply body dimensions (mm) Height | Power supply body dimensions (mm) Width | Power supply mass | Reflected power resistance | Required amount of cooling water | Required power AC200V 50/60Hz |
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HFS-04-010W |
Available upon quote | 10~30℃, 30~80%, but no condensation | Water cooling | 10~30℃, 0.5MPa or less, 3~5kΩ-cm | -40dB or less (at maximum output) | 1kW | Local and remote operation | 400kHz±0.05% | 8D-2V | N type | 50Ω | When the power supply voltage fluctuation is ±10%, within ±1% of the maximum output (when the ambient temperature is 25°C and a dummy load is used) | 1% or less (at maximum output) | Circuit protector, overvoltage/eddy current limiter, reflection limiter | 450 | 200 | 480 | Approximately 30kg | 200W | 4L/min or more | 3φ/3kVA |
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About Company Handling This Product
- Japan