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  4. Microwave power supply, automatic matching box, etc. Microwave power supply (915MHz) (Japan Koshuha Co., Ltd.)
Microwave power supply, automatic matching box, etc. Microwave power supply (915MHz)-MPS-009
Microwave power supply, automatic matching box, etc. Microwave power supply (915MHz)-Japan Koshuha Co., Ltd.

Microwave power supply, automatic matching box, etc. Microwave power supply (915MHz)
Japan Koshuha Co., Ltd.

About This Product

This device is a 915MHz microwave power source that uses an electromagnetic magnetron. There are types with a maximum output of 5kW and 30kW, and they can be used for plasma CVD for semiconductor manufacturing, or as industrial heating equipment.

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    Microwave power supply, automatic matching box, etc. Microwave power supply (915MHz)

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1 Models of Microwave power supply, automatic matching box, etc. Microwave power supply (915MHz)

Image Part Number Price (excluding tax) Cooling method Power supply section Cooling method Oscillating section Mass (kg) Power supply section Mass (kg) Oscillator Indicator Power required Rated output CW External dimensions (mm) Power supply section External dimensions (mm) Oscillator section Frequency Output waveguide Output stability Output ripple Output flange
Microwave power supply, automatic matching box, etc. Microwave power supply (915MHz)-Part Number-MPS-009

MPS-009

Available upon quote

Forced air cooling

Water cooling (6L/min)

About 65

Approximately 170

Traveling wave power, reflected wave power, anode current

3φ, AC200V
11kVA

500W~5kW

480×500×399

570×810×1,250

915MHz±10MHz

WR-975

±1% or less of maximum output value for fluctuations in power supply voltage ±10%

5% p-p or less of maximum output value

CPR-975F

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Japan Koshuha Co., Ltd.

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