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  4. Microwave power supply, automatic matching device, etc. Microwave smart power system MSPS MSPS-050 (Japan Koshuha Co., Ltd.)
Microwave power supply, automatic matching device, etc. Microwave smart power system MSPS MSPS-050-MSPS-050
Microwave power supply, automatic matching device, etc. Microwave smart power system MSPS MSPS-050-Japan Koshuha Co., Ltd.

Microwave power supply, automatic matching device, etc. Microwave smart power system MSPS MSPS-050
Japan Koshuha Co., Ltd.

About This Product

This system is a 2,450MHz band high-output microwave power supply that enables magnetron oscillation with extremely high stability. 2.45GHz microwave power supplies are essential as power supplies for semiconductor manufacturing equipment such as microwave plasma CVD and microwave ECR plasma. Microwave power supplies using magnetrons can construct high-output power supplies at a much lower cost than klystrons or solid-state systems, but they have the disadvantage that the oscillation frequency fluctuates greatly depending on output and load fluctuations. This system is an innovative microwave power supply that solves these drawbacks of magnetrons. Our unique method makes it possible to oscillate the magnetron in complete synchronization with the frequency from the reference frequency oscillator. The frequency is extremely stable.

■Features

-The oscillation frequency does not change even if the output is varied. ・Oscillation stability depends on the oscillation accuracy of the reference signal oscillator. ・The frequency can be manufactured at any point between 2445MHz and 2460MHz. ・Output can be combined by parallel operation. ・Matching accuracy is greatly improved.

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    Microwave power supply, automatic matching device, etc. Microwave smart power system MSPS MSPS-050

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1 Models of Microwave power supply, automatic matching device, etc. Microwave smart power system MSPS MSPS-050

Image Part Number Price (excluding tax) Oscillation frequency Frequency stability Output power
Microwave power supply, automatic matching device, etc. Microwave smart power system MSPS MSPS-050-Part Number-MSPS-050

MSPS-050

Available upon quote

2.45GHz (set to the optimum frequency within the band depending on the magnetron model/characteristics)

1×10-5/h

0.5~5kW

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