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  4. Microwave power supply/automatic matching device, etc. 3E microwave automatic matching device (Japan Koshuha Co., Ltd.)
Microwave power supply/automatic matching device, etc. 3E microwave automatic matching device-3E microwave automatic matching device
Microwave power supply/automatic matching device, etc. 3E microwave automatic matching device-Japan Koshuha Co., Ltd.

Microwave power supply/automatic matching device, etc. 3E microwave automatic matching device
Japan Koshuha Co., Ltd.

About This Product

In the microwave transmission path for 2,450MHz microwave plasma discharge, etc., the load impedance fluctuates due to load fluctuations, and if the impedance becomes mismatched, reflected waves are generated and the efficiency of microwave power decreases. This device is an automatic matching device that automatically processes impedance matching. It also has a built-in control unit and is more compact than previous models.

■Features

・The matching part is a three-element tuner type with three movable short circuits placed on the E side (long side) of the waveguide, which has higher power resistance than the stub type, has a shorter matching response time, and has a wider matching range. It also has a wide range of VSWR of up to 10, and full phase matching is possible. -Outputs the traveling wave detection voltage Pf and reflection wave detection voltage Pr from the power detector as monitor signals. ・The control unit is built into the matching box body. By connecting a PC, various control settings, position memory settings, monitoring, and remote control are possible. Dedicated software for the PC is included. - Natural air cooling eliminates the need to run water pipes.

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    Microwave power supply/automatic matching device, etc. 3E microwave automatic matching device

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1 Models of Microwave power supply/automatic matching device, etc. 3E microwave automatic matching device

Image Part Number Price (excluding tax) Power input Load matching range Matching accuracy Matching method How to operate Response speed Waveguide Dimensions, mass Rated power Frequency range Flange Option Accessories
Microwave power supply/automatic matching device, etc. 3E microwave automatic matching device-Part Number-3E microwave automatic matching device

3E microwave automatic matching device

Available upon quote

DC24V　3A

VSWR 10 or less (all phases)

Residual VSWR1.2 or less typ.

3E tuner method

Settings and operations using RS-232C communication, analog I/O, and CONTROLLER

2 seconds typ.

2GHz flat waveguide (96×27mm)

W220mm×D130mm×H262mm
4.0kG (body)

5kW (CW / PULSE)

2,450±50MHz

TBR-2A2 equivalent

CONTROLLER

PC software (compatible with windows 10)
24V power cable, RS-232C cable

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Japan Koshuha Co., Ltd.

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