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  4. Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron) (Japan Koshuha Co., Ltd.)
Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron)-MKN-032
Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron)-Japan Koshuha Co., Ltd.

Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron)
Japan Koshuha Co., Ltd.

About This Product

This equipment is a microwave power supply essential for semiconductor manufacturing such as microwave plasma CVD and microwave ECR plasma. We have highly stable, low ripple power supplies ranging from 300W to 10kW.

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    Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron)

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1 Models of Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron)

Image Part Number Price (excluding tax) Mass (kg) Power source Oscillator section Indicator Power required Rated output External dimensions WxDxH (mm) Power supply Oscillation section Frequency Output stability Output ripple Output flange Cooling method Power supply section Cooling method Oscillating section
Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron)-Part Number-MKN-032

MKN-032

Available upon quote

Integrated 40

Traveling wave power, reflected wave power, anode power

1φ　AC200V
1.3kVA

120W~300W

Integrated 450x500x249

2,450MHz ±30MHz

±1% or less of maximum output for fluctuations in power supply voltage ±10%

5%p-p or less of maximum output value

Equivalent to BRJ-3

Forced air cooling

Forced air cooling

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Japan Koshuha Co., Ltd.

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