Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron)
Japan Koshuha Co., Ltd.
About This Product
This equipment is a microwave power supply essential for semiconductor manufacturing such as microwave plasma CVD and microwave ECR plasma. We have highly stable, low ripple power supplies ranging from 300W to 10kW.
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Product
Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron)
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Handling Company
Japan Koshuha Co., Ltd.
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Categories
1 Models of Microwave power supply, automatic matching box, etc. Microwave power supply (magnetron)
| Product Image | Part Number | Price (excluding tax) | Cooling method Oscillating section | Cooling method Power supply section | External dimensions WxDxH (mm) Power supply Oscillation section | Frequency | Indicator | Mass (kg) Power source Oscillator section | Output flange | Output ripple | Output stability | Power required | Rated output |
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MKN-032 |
Available upon quote | Forced air cooling | Forced air cooling | Integrated 450x500x249 | 2,450MHz ±30MHz | Traveling wave power, reflected wave power, anode power | Integrated 40 | Equivalent to BRJ-3 | 5%p-p or less of maximum output value | ±1% or less of maximum output for fluctuations in power supply voltage ±10% |
1φ AC200V 1.3kVA |
120W~300W |
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About Company Handling This Product
- Japan