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  4. Anti-coagulation/softening tool Silicone rubber heater for dry etching piping (Hakko Electric Co., Ltd.)
Anti-coagulation/softening tool Silicone rubber heater for dry etching piping-Silicone rubber heater for dry etching piping
Anti-coagulation/softening tool Silicone rubber heater for dry etching piping-Hakko Electric Co., Ltd.

Anti-coagulation/softening tool Silicone rubber heater for dry etching piping
Hakko Electric Co., Ltd.

Hakko Electric Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

2.3hours

Very Fast Response

About This Product

■Features

- Flexible and highly reliable silicone rubber heater. Can be manufactured from one piece with any shape. - When the temperature of the exhaust gas piping of the dry etching equipment drops, deposits will adhere to it and it will no longer be able to maintain its function. Therefore, heating with a silicone rubber heater is effective. ・Design and manufacture according to the shape and size of piping parts. - Silicone rubber sponge is used as insulation material, making it suitable for use in clean areas. -Uses hook-and-loop fasteners, springs, etc. for easy installation and removal during maintenance. - Thermocouples (temperature sensors), thermostats, and thermal fuses can be installed. ・Prevents deposits from adhering to semiconductor process exhaust gas piping

■Applications

Heater for solid heating/heater for metal heating/heater for freezing/prevention of solidification

■It is a thin and flexible sheet heating element.

・The heating element is insulated and protected with silicone rubber reinforced with glass cloth. ・Since it is thin (standard product 1.5mm), the temperature rises in a short time. - Flexible, so it can be used to fit curved surfaces (minimum bending radius 15mm).

■Can be made into any shape and is easy to paste

- By designing the pattern of the metal heating element, it can be manufactured into any shape from a single piece. - Can be easily attached to the heated object using adhesive or double-sided tape.

■This heater is more powerful than it looks.

・A high-power heater that can be used continuously at 200℃ (standard type). - Since a metal heating element (nickel-chromium alloy) is used, the wattage remains constant regardless of the operating temperature. Therefore, it is easy to control and provides stable heating.

■Capacity density

The area of ​​one side of the heater (if square, width x length) is the heat output (wattage) per 1cm2. The standard value is 0.6 to 0.8 W/cm2, but it may need to be changed depending on the operating temperature, installation method, temperature control method, use of insulation material, etc., so please consult us.

■Special specifications

- Compatible with cleanliness. Exposure prevention treatment for fluororesin wires and glass cloth. Suitable for food use. ・Easy to attach and detach from cylindrical shape. "Spring fastening specification" (Note) High temperature type is not available. "Tightening fastener specifications" (Note) Standard fasteners have a pipe outer diameter of 230 mm or more. ・For three-phase power supply. ・Integrated silicone sponge insulation material. - Adhesion to metal plates (stainless steel, aluminum).

  • Product

    Anti-coagulation/softening tool Silicone rubber heater for dry etching piping

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1 Models of Anti-coagulation/softening tool Silicone rubber heater for dry etching piping

Image Part Number Price (excluding tax) Applicable Continuous use temperature Manufacturable range length Manufacturable range Piping diameter Capacity density Lead part Others
Anti-coagulation/softening tool Silicone rubber heater for dry etching piping-Part Number-Silicone rubber heater for dry etching piping

Silicone rubber heater for dry etching piping

Available upon quote

For straight pipe

200℃

50mm~500mm

Φ9.52~φ139.8 (125A)

Standard capacity density is 0.3W/cm2.
It is designed at 0.2~0.6W/cm2 depending on the operating temperature etc.

Silicone rubber insulated glass braided wire (Ni conductor wire)
It is possible to construct connectors that are easy to attach and detach.

We design and manufacture products according to the customer's piping parts, piping layout, and operating temperature.

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About Company Handling This Product

Hakko Electric Co., Ltd.

Response Rate

100.0%

Response Time

2.3hrs

  • Japan

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