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  4. Small developing device for photolithography (Arms System Co., Ltd.)
Small developing device for photolithography-DV-200
Small developing device for photolithography-Arms System Co., Ltd.

Small developing device for photolithography
Arms System Co., Ltd.

About This Product

We have equipment that supports swing nozzle spray development and paddle development.

■Summary

Swing nozzle type spray development/paddle development equipment

■Features

・High performance, low price, compact tabletop type ・Work size φ1" to φ6" ・Easy program input operation on LCD touch panel ・Built-in 2 systems of chemical liquid pressure pumps

  • Product

    Small developing device for photolithography

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1 Models of Small developing device for photolithography

Image Part Number Price (excluding tax) Power supply Vacuum Local exhaust Dimensions/weight Board rotation speed Number of sheets processed Processing time settings Chemical solution used Process Swing nozzle movement amount
Small developing device for photolithography-Part Number-DV-200

DV-200

Available upon quote

AC100V 4A

350mmHg or less

0.3m3/min

Main unit: 550W x 400D x 440H (mm) (740Hmm when the cover is open and closed), approximately 33Kg

0~3000rpm arbitrary setting

150φ or 100Sq board (maximum): 1 piece, 1 inch φ to 6 inch φ: 1 piece

Minimum: 1 second

Alkaline developer, alcohol solvent

Developer: 1 system, Rinse: 1 system (Pulsation-free pressure feeding is possible using a micro pump)

The swing angle can be set arbitrarily and fixed at the center using a program.

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About Company Handling This Product

Arms System Co., Ltd.

  • Japan

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Semiconductor Manufacturing Equipment Component & Part Machining
Semiconductor Manufacturing Equipment Component & Part Machining　Arms System Co., Ltd.
Arms System Co., Ltd.

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