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About This Product
■Summary
・FRC-100V is a small, high-performance magnetron sputter roll coater suitable for research and development and small-lot production.
- Designed to easily coat resin films with transparent conductive films and functional films that have optical properties. It is possible to form a dense film by sputtering, and a variety of travel patterns can be set. Equipped with an easy-to-use control system.
・Roll to roll type is considered advantageous for mass production in fields such as solar power generation and touch panels. It can be used as development and pilot equipment.
- Applications include materials such as ITO, ZnO, SiO2, and SiOx for transparent conductive films, optical films, and metal films.
■Features
・The lowest price in the industry
・Required area is very compact with 4m²
・Can be installed in a clean room
■Simple yet high performance
・Most operations can be performed on one touch panel
・Travel pattern, sputter power setting, gas conduction
-Easy to configure settings etc.
・Two sets of cathodes installed
・Surface modification is possible with RF electrode equipment.
■High performance exhaust system
・The main pump is equipped with a large capacity TMP
・Water is exhausted at high speed by cryo super trap
■Energy saving
Small size and does not use unnecessary energy
Standard configuration
■Vacuum chamber
・3 view ports made of SUS304
・Plate mounting 2 sets
■Exhaust system
・RP 500L/min
・TMP1100L/s+CRYO 4,000L/s (Wed)
・3 position gate valve
■Driving system
・Tension control
・Variable speed servo motor
・Cooled can roll
・CW, CCW, back/front winding possible
■Sputter source
DC magnetron cathode 2 poles
■Pretreatment
RF cathode 1 pole
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