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  4. Slurry motor (pump) current/flow monitoring system (Kyodo International, Inc.)

Slurry motor (pump) current/flow monitoring system
Kyodo International, Inc.

About This Product

It visualizes and digitizes the slurry motor (pump) current and slurry flow rate values ​​for semiconductor CMP equipment, and generates an alarm in the event of an abnormality. This is a monitoring system that prevents the loss of produced wafers due to poor slurry discharge. ■Features ・It is possible to visualize one or both of the motor current value and slurry flow rate value. ・You can select the display device from monitor, PC, tablet, smartphone, etc. - Generates an alarm in case of abnormality ・Interlock control is also available as an option (*Consultation required due to device specifications) ・Display method and communication method (external cloud/WiFi/Bluetooth, etc.) can be customized

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    Slurry motor (pump) current/flow monitoring system

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1 Models of Slurry motor (pump) current/flow monitoring system

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Slurry motor (pump) current/flow monitoring system

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About Company Handling This Product

Kyodo International, Inc.

  • Japan

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Power Monitoring Systems　Kyodo International, Inc.
Kyodo International, Inc.

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