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  4. Retainer ring X3G (Kyodo International, Inc.)
Retainer ring X3G-X3G
Retainer ring X3G-Kyodo International, Inc.

Retainer ring X3G
Kyodo International, Inc.

About This Product

■CMP retainer ring: High functionality (life span, uniformity/uniformity improved model)

Major consumable parts have been upgraded from the viewpoint of "material" and "design" changes, contributing to a significant reduction in total running costs.

■Long life retainer ring

The "X3G" material developed by ESP Spares is a revolutionary "resin material" that not only extends the life of retainer rings but also improves the in-plane profile. In addition to reducing maintenance costs, it also makes it possible to improve yields, significantly reducing the total cost incurred in the CMP process.

■Characteristics of X3G

・Achieves up to 4 times longer lifespan than genuine products. - Solved secondary problems such as side attack and deterioration of in-plane uniformity. - Can be played. X3G is a high-performance resin that retains the advantages of conventional PPS while significantly improving ring life.

■Why X3G is the best/Main features

Reduction of CMP cost due to "low wear" + "low side attack" performance. The material that makes up the retainer ring for CMP does not just have to be hard.

■Long life mechanism of X3G material

The resin does not wear out when polishing the wafer, and it is also resistant to collisions from the sides of the wafer, resulting in stable CMP while minimizing resin wear. By applying a special treatment to the resin, we have completely overcome the "resin side attack problem (dents on the inner wall)" that conventional long-life retainer rings could not solve. This allows stable CMP equivalent to PPS without sacrificing resin thickness.

  • Product

    Retainer ring X3G

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1 Models of Retainer ring X3G

Image Part Number Price (excluding tax)
Retainer ring X3G-Part Number-X3G

X3G

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About Company Handling This Product

Kyodo International, Inc.

Company Overview

Kyodo International, Inc. established in 1970 and based in Kawasaki-shi, Japan, is a manufacturer and distribu...

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  • Japan

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Retainers
Retainers　Kyodo International, Inc.
Kyodo International, Inc.

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