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Multipurpose spin coater POLOS-Spin150i Desktop
Multipurpose spin coater POLOS-Kyodo International, Inc.

Multipurpose spin coater POLOS
Kyodo International, Inc.


About This Product

The biggest feature of the multi-purpose spin coater POLOS is that everything is made of resin. Therefore, in addition to resist coating, it can also be used for purposes such as etching that require alkaline or acidic chemical cleaning.

■What is a spin coater?

A spin coater is a device that creates a thin film using centrifugal force by rotating a smooth substrate at high speed. The name of the device is also called a spinner. The faster the rotation speed, the thinner the produced thin film, and the film thickness must be uniform in the center and periphery.

■What is POLOS?

POLOS, developed by SPS in the Netherlands, is a resin spin coater that uses resin entirely. Since a typical spin coater uses stainless steel, there are problems with metal contamination, chemical resistance, and cleaning time, but the resin spin coater POLOS does not suffer from these problems. In addition, the seamlessly assembled, highly airtight structure and motor with excellent quietness, stability, and acceleration enable not only stable and highly reproducible results to be obtained, but also spin development, spin etching, rinsing/ It can be used for multiple purposes such as cleaning and spin drying. In addition, a wide variety of chucks are available as options, making it compatible with a wide range of substrates, from chip sizes to large diameter substrates. In addition to stand-alone models, we also have a full lineup of wet station types integrated with utilities, and components for incorporating into wet stations.

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    Multipurpose spin coater POLOS

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1 Models of Multipurpose spin coater POLOS

Image Part Number Price (excluding tax) Phenomenon Washing Outline Compatible board size Drying Rinse Dispense Coating manual Etching
Multipurpose spin coater POLOS-Part Number-Spin150i Desktop

Spin150i Desktop

Available upon quote

Standard type with 3 program output terminals. (Example: Dispense unit, N2 diffuser, etc.) - Can be used as an automatic dispenser by using the output terminal

Up to φ160mm (or 6”) or 4”x4”

Manual

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About Company Handling This Product

Company Overview

Kyodo International, Inc. established in 1970 and based in Kawasaki-shi, Japan, is a manufacturer and distribu...

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