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  4. Automatic mask aligner for large substrates, mass production Model 6020 (Kyodo International, Inc.)
Automatic mask aligner for large substrates, mass production Model 6020-Industrial Model6020
Automatic mask aligner for large substrates, mass production Model 6020-Kyodo International, Inc.

Automatic mask aligner for large substrates, mass production Model 6020
Kyodo International, Inc.

About This Product

Model 6020 is a mask alignment exposure system suitable for large formats. Meets processing demands for flat panel displays and other large substrates (up to 20″ x 20″).

■Mask aligner

A mask aligner is a device that uses ultraviolet light to transfer and print a fine pattern onto a sample, and is also called a mask alignment device. Substrate materials range from silicon, glass, ceramic, gallium arsenide, and guesswork. Generally, it is mostly used for manufacturing semiconductor elements such as transistors and ICs, but it is also used for forming LCD glass patterns and manufacturing crystal oscillators. OAI's mask aligners are used worldwide for R&D and mass production. Our customers have praised our products as being superior to other companies' products in terms of reliability, durability, and technological superiority. It has a particularly good reputation as a mask aligner with excellent cost performance. By simply adding an optional controller and chuck, you can upgrade to a device that can perform microfluidic chip manufacturing and UV nanoimprinting. Ideal for semiconductor, display, MEMS, microfluidic, nanoimprint, medical/bio, and solar cell applications.

■Features of OAI products

- Compact table top equipment with a rich lineup ranging from R&D applications to semi/fully automatic mass production machines. ・We also sell light sauce only. ・Based on many years of manufacturing experience, we provide systems that are economical, reliable, and scalable by assembling fully tested and verified modular parts. ・Semiconductor lithography, microfluidics, nanoimprint, MEMS, UV curing, biotechnology, solar cells, resistance characteristic evaluation, etc.

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    Automatic mask aligner for large substrates, mass production Model 6020

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1 Models of Automatic mask aligner for large substrates, mass production Model 6020

Image Part Number Price (excluding tax) Exposure time Exposure mode resolution Board size Ancillary equipment Mask compatible sizes Size Alignment accuracy Alignment stage control
Automatic mask aligner for large substrates, mass production Model 6020-Part Number-Industrial Model6020

Industrial Model6020

Available upon quote

1s-999s (0.1s interval)

Proximity: 5μm Soft contact: 3-5μm Hard contact: 2-3μm Vacuum contact: <2μm

12 inch square – up to 20 inch square

Power supply: 400V or 208V, 3P5 wire vacuum line, air line or N2 line, exhaust line

14 inch square – up to 24 inch square

71,530mmH×76,825mmW×36,290mmD

One side: 0.5μm Both sides: 1μm

Z movement: 1,500µm

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About Company Handling This Product

Kyodo International, Inc.

Company Overview

Kyodo International, Inc. established in 1970 and based in Kawasaki-shi, Japan, is a manufacturer and distribu...

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  • Japan

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FPD Lithography Equipment　Kyodo International, Inc.
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