Fully automatic mass production mask aligner for mass production Model 6000-Model 6000 for mass production

Fully automatic mass production mask aligner for mass production Model 6000
Kyodo International, Inc.

About This Product

The Model 6000 is a mask aligner system that is fully automatic, fully computer controlled, and features optical backside contact exposure. Throughput is possible at 180 wafers per hour. This model is suitable for semiconductor and MEMS production lines. Suitable for corporate production industries, it can be introduced with high cost performance for small and medium-sized enterprises, from research and development purposes to medium-sized mass production.

■Mask alignerA mask aligner is a device that uses ultraviolet light to transfer and print a fine pattern onto a sample, and is also called a mask alignment device. Substrate materials range from silicon, glass, ceramic, gallium arsenide, and guesswork. Generally, it is mostly used for manufacturing semiconductor elements such as transistors and ICs, but it is also used for forming LCD glass patterns and manufacturing crystal oscillators.

OAI's mask aligners are used worldwide for R&D and mass production. Our customers have praised our products as being superior to other companies' products in terms of reliability, durability, and technological superiority. It has a particularly good reputation as a mask aligner with excellent cost performance.

By simply adding an optional controller and chuck, you can upgrade to a device that can perform microfluidic chip manufacturing and UV nanoimprinting. Ideal for semiconductor, display, MEMS, microfluidic, nanoimprint, medical/bio, and solar cell applications.

■Features of OAI products- Compact table top equipment with a rich lineup ranging from R&D applications to semi/fully automatic mass production machines.
・We also sell light sauce only.
・Based on many years of manufacturing experience, we provide systems that are economical, reliable, and scalable by assembling fully tested and verified modular parts.
・Semiconductor lithography, microfluidics, nanoimprint, MEMS, UV curing, biotechnology, solar cells, resistance characteristic evaluation, etc.

Model
There is 1 model available for this product.

Product
Fully automatic mass production mask aligner for mass production Model 6000

Handling Company
Kyodo International, Inc.

Categories

Machining / Machine Tools

FPD Lithography Equipment

Semiconductor Manufacturing

Lithographers

Semiconductor Manufacturing

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1 Models of Fully automatic mass production mask aligner for mass production Model 6000

Image	Part Number	Price (excluding tax)	Exposure time	Exposure mode resolution	Board size	Ancillary equipment	Size	Alignment accuracy	Alignment stage control
	Model 6000 for mass production	Available upon quote	1s-999s (0.1s interval)	Proximity, soft contact, hard contact, vacuum contact	50mm~200mm wafer/square or 200mm~300mm wafer/square 100um~7mm thickness 7mm~10mm warp amount	Power supply: 220V vacuum line, air line or N2 line, exhaust line	1,651mH x 2,184mmW x 1,364mmD	One side: 0.5µm Both sides: ＜2µm (3σ)	XY movement: ±6.5mm Z movement: 1,500µm Rotation: ±5°

Image

Part Number

Price (excluding tax)

Exposure time

Exposure mode resolution

Board size

Ancillary equipment

Size

Alignment accuracy

Alignment stage control

Model 6000 for mass production

Available upon quote

1s-999s (0.1s interval)

Proximity, soft contact, hard contact, vacuum contact

50mm~200mm wafer/square or 200mm~300mm wafer/square 100um~7mm thickness 7mm~10mm warp amount

Power supply: 220V vacuum line, air line or N2 line, exhaust line

1,651mH x 2,184mmW x 1,364mmD

One side: 0.5µm Both sides: ＜2µm (3σ)

XY movement: ±6.5mm Z movement: 1,500µm Rotation: ±5°

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About Company Handling This Product

Kyodo International, Inc.

Company Overview

Kyodo International, Inc. established in 1970 and based in Kawasaki-shi, Japan, is a manufacturer and distribu...

Japan

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Fully automatic mass production mask aligner for mass production Model 6000 Kyodo International, Inc.

About This Product

■Mask aligner

■Features of OAI products

1 Models of Fully automatic mass production mask aligner for mass production Model 6000

Model 6000 for mass production

Customers who viewed this product also viewed

Other products of Kyodo International, Inc.

About Company Handling This Product

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Fully automatic mass production mask aligner for mass production Model 6000
Kyodo International, Inc.