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  4. Semi-auto double-sided mask aligner R&D/Low volume Model800E (Kyodo International, Inc.)
Semi-auto double-sided mask aligner R&D/Low volume Model800E-R&D/Low-volume Model800E
Semi-auto double-sided mask aligner R&D/Low volume Model800E-Kyodo International, Inc.

Semi-auto double-sided mask aligner R&D/Low volume Model800E
Kyodo International, Inc.

About This Product

The Model 800E semi-automatic double-sided mask aligner is a system in a hard package that combines optical double-sided alignment functionality. It can be left to the equipment and operates semi-automatically. Optical top or bottom surface alignment is possible for R&D, and it is also suitable for use as a low-volume production machine.

■Mask aligner

A mask aligner is a device that uses ultraviolet light to transfer and print a fine pattern onto a sample, and is also called a mask alignment device. Substrate materials range from silicon, glass, ceramic, gallium arsenide, and guesswork. Generally, it is mostly used for manufacturing semiconductor elements such as transistors and ICs, but it is also used for forming LCD glass patterns and manufacturing crystal oscillators. OAI's mask aligners are used worldwide for R&D and mass production. Our customers have praised our products as being superior to other companies' products in terms of reliability, durability, and technological superiority. It has a particularly good reputation as a mask aligner with excellent cost performance. By simply adding an optional controller and chuck, you can upgrade to a device that can perform microfluidic chip manufacturing and UV nanoimprinting. Ideal for semiconductor, display, MEMS, microfluidic, nanoimprint, medical/bio, and solar cell applications.

■Features of OAI products

- Compact table top equipment with a rich lineup ranging from R&D applications to semi/fully automatic mass production machines. ・We also sell light sauce only. ・Based on many years of manufacturing experience, we provide systems that are economical, reliable, and scalable by assembling fully tested and verified modular parts. ・Semiconductor lithography, microfluidics, nanoimprint, MEMS, UV curing, biotechnology, solar cells, resistance characteristic evaluation, etc.

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    Semi-auto double-sided mask aligner R&D/Low volume Model800E

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1 Models of Semi-auto double-sided mask aligner R&D/Low volume Model800E

Image Part Number Price (excluding tax) Exposure time Exposure mode resolution Board size Ancillary equipment Mask compatible sizes Size Alignment accuracy Alignment stage control
Semi-auto double-sided mask aligner R&D/Low volume Model800E-Part Number-R&D/Low-volume Model800E

R&D/Low-volume Model800E

Available upon quote

1s-3,200s (0.1s interval)

Proximity: 3-5μm (15-20μm gap) Soft contact: 2μm Hard contact: 1μm Vacuum contact: sub-μm

Up to 8 inch square

Power supply: 220V vacuum line, air line or N2 line, exhaust line

Up to 9 inch square

1,810mmH×1,270mmW×912mmD

One side: 0.5~1µm Both sides: ＜2µm (3σ)

XY movement: ±5mm Rotation: ±4°

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About Company Handling This Product

Kyodo International, Inc.

Company Overview

Kyodo International, Inc. established in 1970 and based in Kawasaki-shi, Japan, is a manufacturer and distribu...

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  • Japan

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Lithographers　Kyodo International, Inc.
Kyodo International, Inc.

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