Foreign matter/coarse particle measuring equipment "Falling dust counter" DTSP10-03 for investigating adherent foreign matter/falling dust
NCC Co., Ltd.
About This Product
■Summary
A special measuring device that can measure falling dust instead of floating dust.Classifies and counts coarse particles of 10μm or more.
■Do you have any of these problems?
・Despite working in a clean room, the amount of foreign matter does not decrease.
・Although it is managed using a particle counter, it is not possible to correlate it with defects.
・I want to create a clean environment, but I don't know how to manage it.
・It is difficult to prevent foreign matter from being brought in from clothing, etc.
■Measuring falling dust rather than floating dust leads to countermeasures against adhering foreign matter.
If you want to reduce the amount of foreign matter adhering to your product, you should measure it with a falling dust counter instead of a particle counter.
The reason is that
① Coarse particles that cause attached foreign matter are large, ranging from 10 μm to 100 μm, and cannot be measured with a particle counter.
② Large particles do not float in the air, but settle and become falling dust.
The above two are mentioned. In addition, ISO14644-17 has been enacted since February 2021, making it possible to directly use coarse particles that cause defects as a management indicator. Therefore, by measuring falling dust rather than minute floating dust in the air, it is possible to manage adhering foreign matter.
■What is a falling dust counter?
This is a special measuring device that can measure fallen coarse particles rather than floating dust. A sample collection plate (4-inch silicon wafer) is used to classify and count falling coarse particles of 10 μm or more, taking advantage of the sedimentation properties of coarse particles. It can be evaluated anywhere that silicon wafers can be placed.
*Silicon wafer: A disk-shaped sample plate that is a semiconductor substrate with excellent surface flatness and heat resistance.
This machine is a measuring device that samples silicon wafers and specializes in classifying and counting coarse particles of 10 μm to 100 μm. For foreign objects such as hair that are 100 μm or larger, it is not suitable to use silicon wafers as samples due to their shape and weight. "DUSCAR®100 BLACK" is recommended for investigating larger foreign objects.
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Product
Foreign matter/coarse particle measuring equipment "Falling dust counter" DTSP10-03 for investigating adherent foreign matter/falling dust
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Handling Company
NCC Co., Ltd.
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Categories
1 Models of Foreign matter/coarse particle measuring equipment "Falling dust counter" DTSP10-03 for investigating adherent foreign matter/falling dust
| Product Image | Part Number | Price (excluding tax) | Compatible wafer size | Display switching | Maximum measurement area | Minimum measurable particle size | Particle size classification | Trimming function |
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DTSP10-03 |
Available upon quote |
4 inches 2 inches *4) *4) Counting efficiency is guaranteed only for a 4-inch area, but cannot be guaranteed for a 2-inch area. |
Yes (can be displayed separately) |
4 inches: φ80mm 2 inches: φ30mm |
10μm |
10μm, 30μm, 50μm, 100μm Value can be set arbitrarily in the range of 11~99μm *3) *3) The threshold values set for arbitrary classification are values obtained from the calibration curve, and counting efficiency cannot be guaranteed. |
4 inches: Yes 2 inches: none |
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About Company Handling This Product
- Japan