Foreign matter/coarse particle measuring equipment "Falling dust counter" DTSP10-03 for investigating adherent foreign matter/falling dust-DTSP10-03

falling dust
NCC Co., Ltd.

NCC Co., Ltd.'s Response Status

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100.0%

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9.1hours

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About This Product

■SummaryA special measuring device that can measure falling dust instead of floating dust.Classifies and counts coarse particles of 10μm or more.

■Do you have any of these problems?・Despite working in a clean room, the amount of foreign matter does not decrease.
・Although it is managed using a particle counter, it is not possible to correlate it with defects.
・I want to create a clean environment, but I don't know how to manage it.
・It is difficult to prevent foreign matter from being brought in from clothing, etc.

■Measuring falling dust rather than floating dust leads to countermeasures against adhering foreign matter.If you want to reduce the amount of foreign matter adhering to your product, you should measure it with a falling dust counter instead of a particle counter.

The reason is that
① Coarse particles that cause attached foreign matter are large, ranging from 10 μm to 100 μm, and cannot be measured with a particle counter.
② Large particles do not float in the air, but settle and become falling dust.
The above two are mentioned. In addition, ISO14644-17 has been enacted since February 2021, making it possible to directly use coarse particles that cause defects as a management indicator. Therefore, by measuring falling dust rather than minute floating dust in the air, it is possible to manage adhering foreign matter.

■What is a falling dust counter?This is a special measuring device that can measure fallen coarse particles rather than floating dust. A sample collection plate (4-inch silicon wafer) is used to classify and count falling coarse particles of 10 μm or more, taking advantage of the sedimentation properties of coarse particles. It can be evaluated anywhere that silicon wafers can be placed.
*Silicon wafer: A disk-shaped sample plate that is a semiconductor substrate with excellent surface flatness and heat resistance.

This machine is a measuring device that samples silicon wafers and specializes in classifying and counting coarse particles of 10 μm to 100 μm. For foreign objects such as hair that are 100 μm or larger, it is not suitable to use silicon wafers as samples due to their shape and weight. "DUSCAR®100 BLACK" is recommended for investigating larger foreign objects.

Model
There are 1 models for this product.

Product
Foreign matter/coarse particle measuring equipment "Falling dust counter" DTSP10-03 for investigating adherent foreign matter/falling dust

Handling Company
NCC Co., Ltd.

Categories

Meters & Instruments

Particle Counters

Measuring Equipment

Dust Monitors

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Last viewed: 1 hour ago

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1 Models of Foreign matter/coarse particle measuring equipment "Falling dust counter" DTSP10-03 for investigating adherent foreign matter/falling dust

Image	Part Number	Price (excluding tax)	Display switching	Particle size classification	Minimum measurable particle size	Maximum measurement area	Compatible wafer size	Trimming function
	DTSP10-03	Available upon quote	Yes (can be displayed separately)	10μm, 30μm, 50μm, 100μm Value can be set arbitrarily in the range of 11~99μm 3) 3) The threshold values set for arbitrary classification are values obtained from the calibration curve, and counting efficiency cannot be guaranteed.	10μm	4 inches: φ80mm 2 inches: φ30mm	4 inches 2 inches 4) 4) Counting efficiency is guaranteed only for a 4-inch area, but cannot be guaranteed for a 2-inch area.	4 inches: Yes 2 inches: none

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About Company Handling This Product

NCC Co., Ltd.

Response Rate

100.0%

Response Time

9.1hrs

Japan

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Foreign matter/coarse particle measuring equipment "Falling dust counter" DTSP10-03 for investigating adherent foreign matter/falling dust NCC Co., Ltd.

NCC Co., Ltd.'s Response Status

About This Product

■Summary

■Do you have any of these problems?

■Measuring falling dust rather than floating dust leads to countermeasures against adhering foreign matter.

■What is a falling dust counter?

1 Models of Foreign matter/coarse particle measuring equipment "Falling dust counter" DTSP10-03 for investigating adherent foreign matter/falling dust

DTSP10-03

Customers who viewed this product also viewed

Other products of NCC Co., Ltd.

About Company Handling This Product

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Foreign matter/coarse particle measuring equipment "Falling dust counter" DTSP10-03 for investigating adherent foreign matter/falling dust
NCC Co., Ltd.