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Face-down type expander OEX-FD-series compatible with stealth dicer-OEX-FD 8inch type
Face-down type expander OEX-FD-series compatible with stealth dicer-OHMIYA IND.CO.,LTD

Face-down type expander OEX-FD-series compatible with stealth dicer
OHMIYA IND.CO.,LTD


About This Product

Face-down expansion and forced suction from the bottom of the stage limit the adhesion of Si particles generated during cutting. Compared to conventional methods, it is possible to improve yield and reduce process steps. In addition, by adopting a motor drive, it achieves precise division at low speeds and short strokes, making it superior for fragile workpieces such as MEMS.

■Complete dry process

By setting the wafer facing downward and forcibly sucking up Si debris generated during cutting, adhesion to the workpiece is minimized. Wafers such as MEMS and CMOS that cannot be wet cleaned can also be completed using a completely dry process.

■Precise condition settings possible

Adopts a motor drive system, allowing precise condition settings. Conditions such as expansion stroke and expansion speed can be easily operated using the touch panel. Even fragile workpieces can be cut with high quality without damage.

■Full auto compatible

It also supports full automation with a loader and unloader installed. The unevenness that was previously caused by manual work will be eliminated.

■Automatic cut function

The automatic cutting function saves labor and makes work more uniform. Can cut from low stroke to high stroke.

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    Face-down type expander OEX-FD-series compatible with stealth dicer

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1 Models of Face-down type expander OEX-FD-series compatible with stealth dicer

Image Part Number Price (excluding tax) Power supply Equipment weight Equipment dimensions Temperature adjustment Lifting speed Expansion amount Compatible sizes Air
Face-down type expander OEX-FD-series compatible with stealth dicer-Part Number-OEX-FD 8inch type

OEX-FD 8inch type

Available upon quote

AC100V50/60Hz10A

Approximately 250kg

W700×D1,250×H1,470 (mm)
*Excluding protrusions such as signal towers etc.

Room temperature~80℃

Adjustable in increments of 0.1~20mm/sec0.1mm/s

7mm~50mm/stopping accuracy ±0.1mm

8inch dicing frame

0.4~0.5Mpa10L/minφ8 one-touch fitting

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About Company Handling This Product

Company Overview

OHMIYA IND.CO.LTD, established in 1975 and headquartered in Hiroshima, Japan, is a manufacturer and distributo...

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  • Japan

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