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Rotating 1-cassette spin dryer OKV-seriesHandling Company
OHMIYA IND.CO.,LTDImage | Part Number | Price (excluding tax) | Driving air | Power supply | Equipment dimensions | Body exterior | Drain | Exhaust port | Compatible wafer size | Safety mechanism | Number of revolutions | Rotor material | Timer | Air filter | Ionizer |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
OKV 6inch type |
Available upon quote |
Clean dry air |
Three-phase AC200V±10% 50/60Hz (terminal block) |
W423×D839×H780 (mm) |
Front/side: SUS304 Back: PVC |
VP25A 1 location (from chamber) |
VP50A 1 location (from chamber) |
2~12inch |
With front lid close sensor and door lock mechanism while rotor is rotating |
Max rotation speed: 3,000min^-1 |
SUS304 electrolytic polishing treatment |
1st to 8th speed (0 to 999sec. 8 steps setting possible) |
ULPA/HEPA selectable |
Standard equipment |
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