■Summary
Resistance heating compact vapor deposition equipment for research and development and small lot production. Some models in this series can also be equipped with an electron beam (EB).
■Features
It has a compact appearance and excellent internal mechanism and control system, and the exhaust system can be operated manually or fully automatically. It can easily form metal films such as aluminum and chromium from dielectric films (optical systems), and its applications are wide-ranging. We also manufacture automatic evaporation control types using electron beam evaporation, film thickness monitors, and large-scale evaporation systems for production use.
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