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  1. Metoree
  2. Semiconductor Manufacturing
  3. Chemical Vapor Deposition (CVD) Systems
  4. Vacuum drying equipment/vacuum baking equipment Small CVD equipment SFCV series (Irie Co., Ltd.)
Vacuum drying equipment/vacuum baking equipment Small CVD equipment SFCV series-SFCV-1001
Vacuum drying equipment/vacuum baking equipment Small CVD equipment SFCV series-Irie Co., Ltd.

Vacuum drying equipment/vacuum baking equipment Small CVD equipment SFCV series
Irie Co., Ltd.

Irie Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

13.9hours

Company Review

4.8

Relatively Fast Response

About This Product

■Summary

This is a tubular furnace-type high-temperature thermal CVD device suitable for developing various materials using hydrocarbon compounds such as graphene.

■Features

This is a tube furnace-type high-temperature thermal CVD device suitable for developing various materials using hydrocarbon compounds such as graphene at universities and research institutes. The machine has been miniaturized so that small-volume, small-sized test pieces can be produced with simple operations, and at the same time, significant cost reductions have been achieved. In addition, it is equipped with a pressure control function of 5 to 100 Pa, which has traditionally been considered difficult with small machines, making it possible to handle a wider variety of processing patterns. In addition, for hydrocarbon-based combustible gases, we are equipped with safety devices such as alarm detection to shut down equipment and an atmospheric release gas dilution unit.

  • Product

    Vacuum drying equipment/vacuum baking equipment Small CVD equipment SFCV series

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1 Models of Vacuum drying equipment/vacuum baking equipment Small CVD equipment SFCV series

Image Part Number Price (excluding tax) Power single phase Mass Tubular furnace heating area Tubular furnace heater capacity Vacuum gauge Atmospheric pressure return Vacuum gauge pressure control Vacuum pump oil rotary vacuum pump Furnace core tube material Furnace core tube inner diameter Operation panel External dimensions (W×D×H) Heating temperature: Regular use Heating temperature Max Control temperature control Control pressure control Gas dilution air ejector Gas supply mass flow controller Gas supply Gas pipe type flow meter
Vacuum drying equipment/vacuum baking equipment Small CVD equipment SFCV series-Part Number-SFCV-1001

SFCV-1001

Available upon quote

100V・30A

125kg

1 zone

1.0kW

Digital compound meter: -100kPa~+100kPa

Capacitance manometer: 0.133~1330Pa, 100Pa~133kPa

Pumping speed: 100~150L/min

Transparent quartz tube

Φ24mm, φ50mm

Each equipment switch, program temperature controller, vacuum gauge
Display: Temperature, degree of vacuum, operating equipment ON/OFF, alarm, power supply

1,450×500×1,200mm

100~1,000℃

1,150℃

Program control

Valve ON/OFF control

Air flow rate: 15Nl/min

Flow rate: 10~100sccm

Flow rate: 10~100sccm

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About Company Handling This Product

Irie Co., Ltd.

Response Rate

100.0%

Response Time

13.9hrs

Company Review

4.8
  • Japan

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Chemical Vapor Deposition (CVD) Systems
Chemical Vapor Deposition (CVD) Systems　Irie Co., Ltd.
Irie Co., Ltd.

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