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  2. Wafer rapid drying equipment spin dryer H840A / SPD-180 (Irie Co., Ltd.)
Wafer rapid drying equipment spin dryer H840A / SPD-180-SPD180RN
Wafer rapid drying equipment spin dryer H840A / SPD-180-Irie Co., Ltd.

Wafer rapid drying equipment spin dryer H840A / SPD-180
Irie Co., Ltd.

About This Product

Ideal for rapid drying after diffusion pretreatment cleaning Ideal model for rapid drying after cleaning various wafers

■Features

Irie's spin dryer is ideal for rapid drying after diffusion pretreatment and cleaning. A perfect model for rapid drying after cleaning various wafers. ・The most suitable type for megabit memory devices. - Ideal for cleaning wafers, etc. in semiconductor manufacturing processes and rapid drying after dicing. ・Since clean air is always sucked from the upper lid, the wafer surface is always kept clean and dry. - Maintenance is very easy as the rotor can be easily attached and detached. It can be said that there is no contamination from bearings, etc. ・Auto door interlock system, etc. ensure complete operational safety. ・Can process from 4”φ to 12”φ. - Can be added to existing automatic cleaning systems. - Anti-static and Ulpa filters are standard equipment.

  • Product

    Wafer rapid drying equipment spin dryer H840A / SPD-180

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1 Models of Wafer rapid drying equipment spin dryer H840A / SPD-180

Image Part Number Price (excluding tax) Static eliminator Power supply Weight Pure water Exhaust/drainage Safety mechanism External dimensions (mm) Rotation speed (inverter control) Carrier size used Motor Timer (optional digital setting) N2
Wafer rapid drying equipment spin dryer H840A / SPD-180-Part Number-SPD180RN

SPD180RN

Available upon quote

Installation in tank

AC 3 phase 200V 50/60Hz

Approximately 85kg

0.1~0.2Mpa 3L/min

Tank exhaust VP75 (connected to general exhaust) Tank exhaust drainage VP75 (must be connected separately to general exhaust and general drainage)

Auto door lock mechanism, anti-vibration mechanism

540W×734D×998H

Tank cleaning 0~1,500rpm Dry 0~3,500rpm (3,000rpm or less for diameters of 150mm or more)

Diameter 50~200mm×1

AC 3 phase 200V 4P 0.4KW

Tank cleaning 0~999 seconds 1st speed variable 0~999 seconds 2nd speed variable 0~999 seconds

0.2~0.3Mpa 20L/min

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About Company Handling This Product

Irie Co., Ltd.

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