Air-driven low pulsation bellows pump FLP series
Irie Co., Ltd.
About This Product
Achieves low pulsation without the need for a damper, contributing to total cost reduction.Achieves stable operation with excellent load followability suitable for single-wafer processes.
■Low pulsation
The controller always knows the position of the bellows based on the signals from the laser displacement sensor and proximity switch. The controller determines the optimal amount of phase overlap between the left and right bellows and switches the solenoid valve to reduce pulsation.
■Excellent load followability suitable for single-wafer processes
Phase control improves followability during load fluctuations. Especially in lines where pressure fluctuations occur frequently, such as in single-wafer processes, its high load followability enables stable operation with stable discharge volume and discharge pressure.
■No need for a damper, saving space
Since there is no need to incorporate a damper, the space of the device can be saved. Piping work is easy and the need for expensive piping materials such as fluororesin joints can be reduced, contributing to smaller and lighter equipment.
■Safety design
The bellows welded structure prevents liquid leakage, and even if the bellows breaks, it is equipped with a leak sensor that detects liquid leakage, so you can use it with confidence.
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Product
Air-driven low pulsation bellows pump FLP series
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Handling Company
Irie Co., Ltd.
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Categories
1 Models of Air-driven low pulsation bellows pump FLP series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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FLP-60W |
Available upon quote |
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About Company Handling This Product
- Japan