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Air-driven low pulsation bellows pump FLP series-FLP-60W
Air-driven low pulsation bellows pump FLP series-Irie Co., Ltd.

Air-driven low pulsation bellows pump FLP series
Irie Co., Ltd.

Irie Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

13.9hours

Relatively Fast Response


About This Product

Achieves low pulsation without the need for a damper, contributing to total cost reduction.Achieves stable operation with excellent load followability suitable for single-wafer processes.

■Low pulsation

The controller always knows the position of the bellows based on the signals from the laser displacement sensor and proximity switch. The controller determines the optimal amount of phase overlap between the left and right bellows and switches the solenoid valve to reduce pulsation.

■Excellent load followability suitable for single-wafer processes

Phase control improves followability during load fluctuations. Especially in lines where pressure fluctuations occur frequently, such as in single-wafer processes, its high load followability enables stable operation with stable discharge volume and discharge pressure.

■No need for a damper, saving space

Since there is no need to incorporate a damper, the space of the device can be saved. Piping work is easy and the need for expensive piping materials such as fluororesin joints can be reduced, contributing to smaller and lighter equipment.

■Safety design

The bellows welded structure prevents liquid leakage, and even if the bellows breaks, it is equipped with a leak sensor that detects liquid leakage, so you can use it with confidence.

  • Product

    Air-driven low pulsation bellows pump FLP series

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1 Models of Air-driven low pulsation bellows pump FLP series

Image Part Number Price (excluding tax) Drive method Explosion-proof Mass kg Installation environment Self-priming ability Maximum pulsating pressure width MPa Maximum transfer liquid viscosity mPa•s Maximum discharge rate L/min Maximum stroke number spm Maximum air consumption NL/min Connection piping port mmφ Storage ambient temperature Supply air connection port size Rc Supply air pressure MPa Operating liquid temperature range (maximum supply air pressure) °C (MPa) Terms of use Operating ambient temperature Air purge port connection port φ
Air-driven low pulsation bellows pump FLP series-Part Number-FLP-60W

FLP-60W

Available upon quote

Drive air external forced switching system

Non-explosion proof construction (cannot be used in flammable or explosive gas/liquid environments)

Twenty two

Indoors (in an environment with little dust), no severe vibrations/shocks, no splashing of water/oil, etc., no corrosive gases that would significantly deteriorate the pump material.

M1

0.06

50

50

120140155160

464419338252116

25× φ22 (tube)

Humidity ℃ /%RH-10 ~ 60 (No freezing) / 35 ~ 95 (No condensation)

3/8

0.41 ~ 0.50.31 ~ 0.40.21 ~ 0.30.11 ~ 0.20.1

5 ~ 100 (0.5), 101 ~ 150 (0.4), 151 ~ 180 (0.3)

Intermittent operation, continuous operation

Humidity ℃ /%RH0 ~ 60 (No freezing) / 35 ~ 85 (No condensation)

One-touch fitting for 6

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About Company Handling This Product

Response Rate

100.0%


Response Time

13.9hrs


Company Review

4.8
  • Japan

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