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1mL per shot, greatly improved dispensing performance Chemical replenishment pump CFD-CFD
1mL per shot, greatly improved dispensing performance Chemical replenishment pump CFD-Irie Co., Ltd.

1mL per shot, greatly improved dispensing performance Chemical replenishment pump CFD
Irie Co., Ltd.

Irie Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

14.5hours

Relatively Fast Response


About This Product

■Improved dispensing performance

With a discharge volume of 1 mL per shot, dispensing performance has been significantly improved compared to conventional models. By injecting the minimum necessary amount when necessary, you can accurately control the concentration of wafer cleaning solution. Furthermore, concentration overshoot can be suppressed, leading to lower cleaning solution costs. It also has a built-in siphon prevention mechanism to prevent chemical fluid from flowing out.

■Corrosion-resistant structural meter

The wetted parts are made of all fluororesin (PTFE, PFA, PCTFE) and can be used with acids, alkalis, hydrogen peroxide, and other chemical solutions used in semiconductor applications. In addition, the pump exterior has a highly corrosion-resistant structure by using resin (PTFE, PFA, PP, PVC) and PTFE-coated screws.

■Supports a wide range of discharge rate settings

Stroke length can be easily adjusted by removing the cover at the bottom of the pump. Capable of dispensing up to 2.7mL per shot. (When shipped, 1 mL per shot.)

■Leak sensor standard equipment

Equipped as standard with a leak sensor that can quickly respond in the event of bellows damage.

  • Product

    1mL per shot, greatly improved dispensing performance Chemical replenishment pump CFD

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1 Models of 1mL per shot, greatly improved dispensing performance Chemical replenishment pump CFD

Image Part Number Price (excluding tax) Power supply voltage Mass Allowable current Purpose Maximum discharge pressure Maximum number of strokes Maximum air consumption Wetted parts material Discharge amount Handling liquid temperature range Output format Supply air connection port size Supply air pressure Pump connection size Code Format
1mL per shot, greatly improved dispensing performance Chemical replenishment pump CFD-Part Number-CFD

CFD

Available upon quote

5~24V DC±10%

1.1kg

50mA or less

Chemical replenishment application

0.05MPa

30spm

2.5NL/min

PTFE, PFA, PCTFE

1mL/shot

20~60℃

NPN transistor open collector

Rc1/8

0.15~0.3MPa

1/4” PFA tube (φ6.35×4.35)

PVC 4-core cable, outer diameter φ5.2mm, cable length 5m, with round terminal (0.5-4)

Transmissive microphoto sensor

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About Company Handling This Product

Response Rate

100.0%


Response Time

14.5hrs


Company Review

4.8
  • Japan

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