Air-driven bellows pump for wafer cleaning FA series
Irie Co., Ltd.
About This Product
■Two types with medium temperature specifications
The FA-2 type, a horizontal low flow rate model, and the FA-40VEW type, a vertical high flow rate model, have been standardized. The FA-2 type is suitable for spray-type single wafer processing, and the FA-40VEW type is suitable for cleaning 200/300mm wafers.
■Thick bellows
The FA-40VEW model uses thick bellows. It has excellent pressure resistance and has a long-life design that can withstand long-term continuous operation.
■Sensor drive method
All wetted parts are made of fluororesin. The outer circumference of the pump is also coated with fluororesin, making it a contamination-free design that does not use rubber or metal. Additionally, the body and bellows of the FF-H series are completely welded, so there is no leakage due to heat cycles.
■Easy operation
By connecting to a dedicated controller, you can easily control and manage the discharge amount.
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Product
Air-driven bellows pump for wafer cleaning FA series
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Handling Company
Irie Co., Ltd.
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Categories
1 Models of Air-driven bellows pump for wafer cleaning FA series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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FA-2E-1 |
Available upon quote |
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About Company Handling This Product
- Japan