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  4. Air-driven bellows pump for wafer cleaning FA series (Irie Co., Ltd.)
Air-driven bellows pump for wafer cleaning FA series-FA-2E-1
Air-driven bellows pump for wafer cleaning FA series-Irie Co., Ltd.

Air-driven bellows pump for wafer cleaning FA series
Irie Co., Ltd.

Irie Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

13.9hours

Company Review

4.8

Relatively Fast Response

About This Product

■Two types with medium temperature specifications

The FA-2 type, a horizontal low flow rate model, and the FA-40VEW type, a vertical high flow rate model, have been standardized. The FA-2 type is suitable for spray-type single wafer processing, and the FA-40VEW type is suitable for cleaning 200/300mm wafers.

■Thick bellows

The FA-40VEW model uses thick bellows. It has excellent pressure resistance and has a long-life design that can withstand long-term continuous operation.

■Sensor drive method

All wetted parts are made of fluororesin. The outer circumference of the pump is also coated with fluororesin, making it a contamination-free design that does not use rubber or metal. Additionally, the body and bellows of the FF-H series are completely welded, so there is no leakage due to heat cycles.

■Easy operation

By connecting to a dedicated controller, you can easily control and manage the discharge amount.

  • Product

    Air-driven bellows pump for wafer cleaning FA series

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1 Models of Air-driven bellows pump for wafer cleaning FA series

Image Part Number Price (excluding tax) Drive method Liquid temperature range ℃ Maximum discharge rate L/min Maximum air consumption NL/min Ambient temperature ℃ Supply air pressure range MPa Pump connection size Pump stroke number spm Air connection port size
Air-driven bellows pump for wafer cleaning FA series-Part Number-FA-2E-1

FA-2E-1

Available upon quote

Proximity switch method

5~100

2

50

0~40

0.2~0.4

Rc1/8

Max.150

Rc1/4

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About Company Handling This Product

Irie Co., Ltd.

Response Rate

100.0%

Response Time

13.9hrs

Company Review

4.8
  • Japan

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