Achieved smaller size, lighter weight, and lower cost by increasing pump stroke speed
■High speed stroke
By increasing the pump stroke speed (Max. 240 spm), we have achieved a smaller size, lighter weight, and lower cost, as well as reduced pulsation.
■Contamination free
All wetted parts are made of fluororesin. The outer circumference of the pump is also designed with no exposed metal, including a fluororesin coating. In addition, the use of a uniquely developed shaft seal (PAT.) further reduces particle generation.
■Wide liquid temperature range/high pressure discharge
The liquid temperature range is 5 to 180℃, and the discharge pressure can be up to 0.45 MPa, so it can be used not only for cleaning processes and CMP processes, but also for chemical supply processes.
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