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  2. Machining / Machine Tools
  3. Heating Apparatus
  4. Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i (Irie Co., Ltd.)
Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i-PWH-24i
Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i-Irie Co., Ltd.

Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i
Irie Co., Ltd.

Irie Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

14.5hours

Company Review

4.8

Relatively Fast Response

About This Product

A device that heats ultrapure water used for cleaning silicon wafers in semiconductor production lines, glass substrates in LCD production lines, etc.

■Features

This device heats ultrapure water used for cleaning silicon wafers in semiconductor manufacturing lines, glass substrates in LCD manufacturing lines, etc. The heating section consists of a double-walled quartz lamp, making it a highly efficient ultrapure water heating device that is free from impurity contamination. In addition, the particularly compact and slim design minimizes the installation space for points of use.

■Clean

The container of the heating section is made of quartz glass, and the piping is made of fluororesin.

■Compact

Thin and compact that does not take up much space.

■High performance temperature control

High-output halogen lamps provide excellent temperature rise characteristics and temperature control that responds to flow rate changes.

■High efficiency

Heating efficiency over 95%.

■Safety

Safety features and alarm functions against excessive temperature rise, dry heating, water leakage, etc. ensure safety.

■Applications

・Cleaning of silicon wafers. ・Cleaning of glass substrate for LCD. ・Warm pure water cleaning as an alternative to other CFC-based cleaning.

  • Product

    Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i

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1 Models of Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i

Image Part Number Price (excluding tax) Power supply (50/60Hz) (3 phases, 3 plugs) Weight Set temperature range Temperature control accuracy Flow rate display range Standard flow rate (at 55℃ rise in temperature) Minimum heating flow rate Safety features External communication function External input/output function External dimensions (mm) Equipment/piping wetted materials Heating part container material Heating method Heater power amount Heater
Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i-Part Number-PWH-24i

PWH-24i

Available upon quote

AC200/208V shared 69/67A

Approximately 90kg

25~85℃

±1℃

0~10L/min

6L/min

2L/min

Output stops when detecting flow abnormality, excessive temperature rise, dry heating, liquid leakage, sensor disconnection, lamp disconnection, etc., alarm/display, alarm contact output

RS-232C/RS-485 (optional) cannot be selected at the same time

8-input/14-output signals (may vary depending on individual specifications)

W340×D850×H1,384

Fluororesin

High purity transparent quartz

Radiant heating method using near-infrared light

24kW

Halogen lamp, indirect heating method that does not touch the liquid directly

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About Company Handling This Product

Irie Co., Ltd.

Response Rate

100.0%

Response Time

14.5hrs

Company Review

4.8
  • Japan

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Heating Apparatus
Heating Apparatus　Irie Co., Ltd.
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