Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i
Irie Co., Ltd.
About This Product
A device that heats ultrapure water used for cleaning silicon wafers in semiconductor production lines, glass substrates in LCD production lines, etc.
■Features
This device heats ultrapure water used for cleaning silicon wafers in semiconductor manufacturing lines, glass substrates in LCD manufacturing lines, etc. The heating section consists of a double-walled quartz lamp, making it a highly efficient ultrapure water heating device that is free from impurity contamination. In addition, the particularly compact and slim design minimizes the installation space for points of use.
■Clean
The container of the heating section is made of quartz glass, and the piping is made of fluororesin.
■Compact
Thin and compact that does not take up much space.
■High performance temperature control
High-output halogen lamps provide excellent temperature rise characteristics and temperature control that responds to flow rate changes.
■High efficiency
Heating efficiency over 95%.
■Safety
Safety features and alarm functions against excessive temperature rise, dry heating, water leakage, etc. ensure safety.
■Applications
・Cleaning of silicon wafers.
・Cleaning of glass substrate for LCD.
・Warm pure water cleaning as an alternative to other CFC-based cleaning.
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Product
Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i
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Handling Company
Irie Co., Ltd.
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Categories
1 Models of Ultrapure water heating equipment PWH-24i/PWH-48i/PWH-72i/PWH-96i/PWH-144i
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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PWH-24i |
Available upon quote |
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About Company Handling This Product
- Japan