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  4. Contact angle surface tension measuring device OEG SURFTENS WH 300 (Irie Co., Ltd.)
Contact angle surface tension measuring device OEG SURFTENS WH 300-SURFTENS WH 300
Contact angle surface tension measuring device OEG SURFTENS WH 300-Irie Co., Ltd.

Contact angle surface tension measuring device OEG SURFTENS WH 300
Irie Co., Ltd.

About This Product

■SURFTENS WH 300

SURFTENS WH 300 is the leading equipment for professionals in 200mm and 300mm wafer processing in semiconductor technology. SURFTENS WH 300 is equipped with a 3-axis wafer robot, wafer scanner, load port for 200 or 300mm wafers, fan filter unit and notching system. Suitable for all cleanroom classes, it features automatic contact angle mapping for up to 25 wafers. New feature: Equipped with SECS/GEM interface The SURFTENS WH 300 is a fully automatic contact angle measurement device equipped with a 3-axis wafer handling robot and a 300mm wafer load port, with all the features required for 300mm wafer technology. Since 2020, the SECS/GEM interface has been implemented. SECS/GEM interface supports semi-standard E30, E84/87, E90, E40, E94 and enables control jobs, process jobs, substrate tracking, carrier management and OHT connectivity.

■Software overview

・3 user levels ・Connect to SPC via network interface card ・Operating system Windows XP/7 ・Automatic load port recognition ・Automatic recognition of slot occupancy rate - Automatic measurement recipes assigned to specific load ports (avoid mixing recipes between different wafer sizes) - Guarantees slot integrity ・Notch processing before measurement ・Measurement data is saved on local disk (backup storage on network server is constructed by customer) ・LAN compatible - Includes client software that allows you to evaluate results on your office PC. ・Manual operation mode (joystick)

■Measurement overview

・Automatic, motorized dosing and dosing system ・10ml syringe (for deionized water (pure water)) ・Deionized water (pure water) tank with automatic syringe refill function ・Programmable droplet size ・Automatic dosing on wafer, dosing position is programmable ・System that allows measurement using a second liquid ・Image showing the wafer robot and dosing system with tools in the setup

■Measurement

Tool/software supports freely definable measurement maps

  • Product

    Contact angle surface tension measuring device OEG SURFTENS WH 300

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1 Models of Contact angle surface tension measuring device OEG SURFTENS WH 300

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Contact angle surface tension measuring device OEG SURFTENS WH 300-Part Number-SURFTENS WH 300

SURFTENS WH 300

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About Company Handling This Product

Irie Co., Ltd.

  • Japan

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Contact Angle Meters
Contact Angle Meters　Irie Co., Ltd.
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