■Standard model equipped with handle loosening prevention function
Standard model of diaphragm valve for high purity gas. Adopting the proven 55L type structure, it can handle a wide variety of special high pressure gases. Light and smooth handle operation. The gland section is equipped with a function to prevent the handle from loosening due to vibration.
■Specifications
・Made of stainless steel
・Flammability
・Nonflammable
・Flame support
・Toxic special high pressure gas
■Features
・Standard model with a proven track record as a high-purity gas (for semiconductor special material gas).
- Light and smooth handle opening/closing operation. Container internal pressure of 14.7MPa can be completely closed by manual operation.
・The reference Cv value for compressed gas valves is 0.3.
-Uses SUS316L stainless steel material for the body.
- Compatible with a wide range of materials, from special material gases such as phosphine and arsine to liquefied gases such as high-purity helium, high-purity chlorine, and ammonia.
・Perform leakage measurement (internal leak, external leak) using a helium leak detector.
- The gland section is equipped with a mechanism to prevent loosening due to vibration.
・A type that allows an orifice to be installed inside the filling port is also available.
■Others
- Also available for small containers (V1).
・A variety of filling ports are available according to CGA standards (DISS, etc.).
・For gases other than those listed, please contact us.
■Precautions when handling the product
・When attaching to a container: Do not attach the valve to anything other than a compatible container. (Attach a valve that is compatible with the container.) The screws on the valve and container must be in good condition (there should be no harmful scratches on the screws). (Do not reuse sealing material.) Do not apply excessive torque.
・When filling with gas: Do not overfill (please use a pressure gauge or scale to fill the appropriate amount of gas. After filling with gas, close the valve handle (wrench) with the appropriate torque.)
・When transporting: Do not handle roughly (do not handle roughly or drop it).
・When consuming gas: Open and close the valve quietly and slowly, and do not apply excessive torque.
・When leaving the container: Make sure there is no gas inside the container (Please make sure that there is no gas left in the container.)
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