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  4. Resin paste coater CL (Engineering Lab Co., Ltd.)

Resin paste coater CL
Engineering Lab Co., Ltd.

About This Product

■Product overview

The resin paste coater is a fully automatic coating device developed for the semiconductor industry. The WL is equipped with a twin-air dispenser, and by performing spiral coating on the wafer, it can uniformly coat polyimide and resist. Compared to conventional spin coaters, the amount of liquid used can be significantly reduced, contributing to carbon neutrality. It can accommodate 6 to 12 inch wafers. CL uses a twin air dispenser to finely apply polyimide, resist, silver paste, etc. at a thickness of approximately 50 to 100 um for the purpose of patterning dots or lines on chips mounted on a tray or forming dam structures. . The resin/paste coater is equipped as standard with specifications suitable for the semiconductor industry, such as clean room specifications, FFU, and wafer-compatible suction stages, and can also meet the needs of wafer transportation such as conveyors and loaders.

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    Resin paste coater CL

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1 Models of Resin paste coater CL

Image Part Number Price (excluding tax) Weight Equipment size Image software features Inspection unit Equipped with dispenser Transport system Compatible board Utility Cooling plate Oven XY stage drive

C.L.

Available upon quote

2,200kg

W2,800xD1,500xH2,000mm

Auto alignment, DXF import function

Available

Twin air dispenser

Conveyor or loader

Various substrates of 300mm or less

AC200V, clean dry air: 0.5Mpa, vacuum

None

None

Ball screw

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About Company Handling This Product

Engineering Lab Co., Ltd.

  • Japan

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