High-definition coating device ES12
Engineering Lab Co., Ltd.

About This Product

■Product overviewThe high-precision coating equipment ES series is a high-precision model equipped with an X-Y stage with a repeatable positioning accuracy of ±2 μm or less, making it the ideal model for high-precision coating such as patterning on wafers.

Equipped with a twin air dispenser (full function) as standard, and a top-view camera and side-view camera to easily perform condition setting, monitoring, and inspection, making it possible to achieve fine patterning. Masu.

We have a lineup of three types (ES10, ES12, ES30) depending on the work size, and the ES30 supports 8-inch wafers and can also be connected to an automatic wafer transfer unit. We also have a wide range of optional specifications suitable for the semiconductor industry, such as clean room specifications, FFU, and wafer-compatible adsorption stages.

Model
There are 1 models for this product.

Product
High-definition coating device ES12

Handling Company
Engineering Lab Co., Ltd.

Categories

Machining / Machine Tools

Coating Process Equipment

Machining / Machine Tools

Coaters

Machining / Machine Tools

Dispensers

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1 Models of High-definition coating device ES12

Image	Part Number	Price (excluding tax)	Power supply	Weight	Equipment size	Automatic transport unit	Image software features	Effective application area	Onboard equipment	Equipped with dispenser	Air source	Z maximum speed	XY maximum speed	XY stroke	XYZ drive resolution	XYZ repeat positioning accuracy	Option
	ES12	Available upon quote	Single phase 100Vx1500W	250kg or less	W600xD600xH1,600mm	Not available	Drawing data creation, auto alignment, DXF import function	120x120mm	Top view camera, laser displacement meter, vacuum suction stage, interlock mechanism	Twin air dispenser, piezo jet dispenser	Clean dry air 0.5~0.7Mpax30NL/min	50mm/s	50mm/s	120x120mm	1μm	±2μm	Side view camera, nozzle cleaning unit, nozzle tip position detection unit, vacuum pump, FFU

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