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  4. High-definition coating device ES10 (Engineering Lab Co., Ltd.)
High-definition coating device ES10-ES10
High-definition coating device ES10-Engineering Lab Co., Ltd.

High-definition coating device ES10
Engineering Lab Co., Ltd.

About This Product

■Product overview

The high-precision coating equipment ES series is a high-precision model equipped with an X-Y stage with a repeatable positioning accuracy of ±2 μm or less, making it the ideal model for high-precision coating such as patterning on wafers. Equipped with a twin air dispenser (full function) as standard, and a top-view camera and side-view camera to easily perform condition setting, monitoring, and inspection, making it possible to achieve fine patterning. Masu. We have a lineup of three types (ES10, ES12, ES30) depending on the work size, and the ES30 supports 8-inch wafers and can also be connected to an automatic wafer transfer unit. We also have a wide range of optional specifications suitable for the semiconductor industry, such as clean room specifications, FFU, and wafer-compatible adsorption stages.

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    High-definition coating device ES10

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1 Models of High-definition coating device ES10

Image Part Number Price (excluding tax) Power supply Weight Equipment size Automatic transport unit Image software features Effective application area Onboard equipment Equipped with dispenser Air source Z maximum speed XY maximum speed XY stroke XYZ drive resolution XYZ repeat positioning accuracy Option
High-definition coating device ES10-Part Number-ES10

ES10

Available upon quote

Single phase 100Vx1500W

250kg or less

W600xD600xH1,600mm

Not available

Drawing data creation, auto alignment, DXF import function

100x100mm

Top view camera, laser displacement meter, vacuum suction stage, interlock mechanism

Twin air dispenser, piezo jet dispenser

Clean dry air 0.5~0.7Mpax30NL/min

50mm/s

50mm/s

100x100mm

1μm

±2μm

Side view camera, nozzle cleaning unit, nozzle tip position detection unit, vacuum pump, FFU

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Engineering Lab Co., Ltd.

  • Japan

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Engineering Lab Co., Ltd.

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