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  4. Semiconductor process temperature monitor NTM-DeLTA (IR System Co., Ltd.)
Semiconductor process temperature monitor NTM-DeLTA-NTM-DeLTA
Semiconductor process temperature monitor NTM-DeLTA-IR System Co., Ltd.

Semiconductor process temperature monitor NTM-DeLTA
IR System Co., Ltd.

IR System Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

59.7hours

About This Product

Monitoring wafer temperature during semiconductor processing is a very important process parameter, but until now no appropriate measurement method has been established, so the process status has been estimated using parameters other than temperature. The reason for this is that with general radiation thermometers, the user must determine the emissivity of the object to be measured, and the reliability of temperature measurement itself is poor due to temperature errors due to variations in wafer emissivity within lots. . Our real-time emissivity correction type semiconductor process temperature monitor measures and corrects the emissivity of the target wafer in real time, which has not been possible until now, so accurate temperature measurement can be achieved regardless of the type of wafer film. It has become. In addition, our unique high-sensitivity infrared measurement technology allows measurements down to low temperatures (near the sensitivity limit of the detector). We can also provide various solutions for stray light inside the chamber, which has been a problem up until now.

■Features

・In situ, non-contact process temperature monitoring ・Real-time emissivity & temperature measurement (same measurement point) ・Achieves high sensitivity and wide dynamic range ・Supports high sampling rate (~3kHz) - Abundant interfaces ・Emissivity can be automatically input by using ETA and DeLTA together

■Applications

・RTP process ・PVD process ・CVD process ・Etching process ・MOCVD process, etc.

  • Product

    Semiconductor process temperature monitor NTM-DeLTA

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1 Models of Semiconductor process temperature monitor NTM-DeLTA

Image Part Number Price (excluding tax) Measurement items Measurement temperature range Measurement rate Temperature accuracy Temperature reproducibility Remarks Interface
Semiconductor process temperature monitor NTM-DeLTA-Part Number-NTM-DeLTA

NTM-DeLTA

Available upon quote

Wafer temperature/wafer emissivity

70℃~2,000℃ (depending on application)

~400Hz (with emissivity measurement), ~3kHz (without emissivity measurement)

~500℃: ±0.8℃, ~2,000℃: ±0.15%T

±0.2℃ (typical)

RoHS compatible products

RS232C, analog, Ethernet

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About Company Handling This Product

IR System Co., Ltd.

Response Rate

100.0%

Response Time

59.7hrs

  • Japan

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Temperature Loggers
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