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Scratch/dig automatic inspection device OptiLUX SD-OptiLUX SD
Scratch/dig automatic inspection device OptiLUX SD-IR System Co., Ltd.

Scratch/dig automatic inspection device OptiLUX SD
IR System Co., Ltd.


About This Product

High reproducibility and high reliability as measurements are performed without subjectivity. Dramatically improve product yield.

■Features

・High-resolution dark-field microscopic observation under uniform illumination provides highly reliable measurements without subjectivity. ・The XY stage, Z-axis height, and camera focus are all automatically adjusted to perform highly reproducible measurements. ・Multiple optical systems can be measured at once as long as they fit within the maximum 300x300mm range. ・Autofocus allows quick measurement ・Both manual and automatic surface measurement modes can be selected (you can also check only the necessary part at once) - Conditions can be set arbitrarily for the range and shape specified by the user (multiple optical components can be measured at once) (By programming, automatic measurement can be run outside of business hours, saving time. ) ・It is also possible to save and recall the measurement range setting conditions. ・Create an easy-to-read measurement result report (with mapping that allows you to immediately see where and what kind of flaws are present) (Analysis for individual flaws) (Analysis for complex shapes) (Easy to judge pass/fail against specified threshold values)

■Applications

- For inspection of high-precision optical systems such as flat prototypes, filters, prisms, and optical windows. - Boasts high reproducibility and reliability, eliminating the need for limit samples that were previously required. ・For the field of precision metal processing where you want to agree on standards for surface scratches and spots. ・Other uses for inspecting and measuring surface properties

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    Scratch/dig automatic inspection device OptiLUX SD

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1 Models of Scratch/dig automatic inspection device OptiLUX SD

Image Part Number Price (excluding tax) Drive method Weight (measuring part only) Maximum allowable slope Measurement lens Measurement principle Measurement reproducibility Measurement scratch standard Field of view (FOV) Movement max Movement resolution Pixel resolution Illumination Compliant standards Minimum measurement size Maximum measurement range Positioning Position repeatability Scan speed Size (measuring part only) Camera Working Distance Accessories
Scratch/dig automatic inspection device OptiLUX SD-Part Number-OptiLUX SD

OptiLUX SD

Available upon quote

Ball screw (manual), brushless servo motor

55kg

+/-2°

Mitutoyo infinity correction objective lens, x2 (fixed), depth of focus 184um, single lens WD34mm

Uniform illumination, fully automatic dark field micrometer

99.90%

Scratch: 10-20-40-60-80, Dig: 5-10-20-40-50

5.63×5.63mm

XY 300mm, Z 50mm (other specifications available on request)

XY 0.5um, Z 0.1um

2.75um

LED array uniform light source (color temperature 5,500K)

MIL-PRF-13830B, ANSI/OEOSC OP 1.002:2009

8um

300×300mm However, measurement area/shape can be set within this range

Rotary encoder

XY ±1um, Z ±0.75um

>25㎟/sec

680×680×612mm

Monochrome 2,048 x 2,048 pixels, 10-bit

15mm (as device)

Dedicated Windows7 (64bit) PC, dedicated software, dedicated stage and controller

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