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  4. Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer (Excimer Co., Ltd.)
Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer-Light source for excimer vacuum and excimer vacuum static elimination ionizer
Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer-Excimer Co., Ltd.

Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer
Excimer Co., Ltd.

Excimer Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

6.6hours

Fast Response

About This Product

It contributes to applications such as surface modification using ultraviolet light with a wavelength of 172 nm for purposes such as "wettability," "adhesion," "uniformity," "normality," and "decomposition." We offer simple products and highly reliable products based on our extensive experience. Can be easily attached to the vacuum chamber view port with an ICF114 flange. Achieves low cost and high performance with a simple system structure using an air-cooled excimer lamp. Can be turned on and off instantly.

■Features

・Measures against static electricity problems in vacuum chambers, etc. ・Roll to Roll film antistatic measures ・Adsorption and transportation measures for electrostatic chucks such as wafers, etc. ・Measures against adsorption of foreign matter due to electrostatic charge ・Measures against static electricity for electron microscopes ・Film thickness uniformity and pinhole countermeasures due to charging

  • Product

    Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer

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1 Models of Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer

Image Part Number Price (excluding tax) Power supply size Power supply Vacuum flange port Environmental specifications Wavelength Cooling method Light source size Cable length (lamp to power supply) Gas Function
Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer-Part Number-Light source for excimer vacuum and excimer vacuum static elimination ionizer

Light source for excimer vacuum and excimer vacuum static elimination ionizer

Available upon quote

W250 x H133 x D200mm

AC100V 50/60Hz 2A with ground terminal

ICF114 (JIS flange compatible)

Temperature 15-30℃, humidity 20-80%, no condensation, corrosion, vibration environment conditions.

172nm

Air cooling

W300 x H157 x D180mm

0.5M

N2

Lamp on/off

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About Company Handling This Product

Excimer Co., Ltd.

Response Rate

100.0%

Response Time

6.6hrs

  • Japan

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