Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer
Excimer Co., Ltd.
About This Product
It contributes to applications such as surface modification using ultraviolet light with a wavelength of 172 nm for purposes such as "wettability," "adhesion," "uniformity," "normality," and "decomposition." We offer simple products and highly reliable products based on our extensive experience.
Can be easily attached to the vacuum chamber view port with an ICF114 flange. Achieves low cost and high performance with a simple system structure using an air-cooled excimer lamp. Can be turned on and off instantly.
■Features
・Measures against static electricity problems in vacuum chambers, etc.
・Roll to Roll film antistatic measures
・Adsorption and transportation measures for electrostatic chucks such as wafers, etc.
・Measures against adsorption of foreign matter due to electrostatic charge
・Measures against static electricity for electron microscopes
・Film thickness uniformity and pinhole countermeasures due to charging
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Product
Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer
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Handling Company
Excimer Co., Ltd.
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Categories
1 Models of Excimer light processing system Excimer UV system for vacuum Excimer vacuum light source and excimer vacuum static neutralization ionizer
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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Light source for excimer vacuum and excimer vacuum static elimination ionizer |
Available upon quote |
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About Company Handling This Product
- Japan