SiC coated covering material PERMA-KOTE®-PERMA-KOTE®

SiC coated covering material PERMA-KOTE®
Toyo Tanso Co., Ltd.

About This Product

PERMA-KOTE® is a product in which a high-purity isotropic graphite base material is coated with a dense silicon carbide film using Toyo Tanso's proprietary CVD (chemical vapor deposition) method.

■Features・Silicon carbide film with excellent oxidation resistance, corrosion resistance, and chemical resistance.
・A very hard silicon carbide film that is stable at high temperatures.
- Prevents detachment and scattering of graphite powder and release of gas and impurities from the graphite base material.
・Both graphite base material and silicon carbide membrane are of high purity.
・Both graphite base material and silicon carbide have high thermal conductivity and excellent heat uniformity.
- Material design that does not cause cracks or peeling.
・Silicon carbide-coated graphite is an indispensable material for pancake, barrel, and single-wafer susceptors used in the epitaxial growth process that forms films on the surface of conductor wafers.
・PERMA KOTE®︎ is a graphite product coated with silicon carbide that has semiconductor-level purity and excellent heat and corrosion resistance, and meets user needs as a susceptor for epitaxial growth.

■Usage examples・Susceptor for silicon epitaxial growth
・Silicon single crystal pulling equipment parts
・Susceptor for MOCVD
・Heater
・Soaking plate
・Oxidation-resistant parts

Model
There are 1 models for this product.

Product
SiC coated covering material PERMA-KOTE®

Handling Company
Toyo Tanso Co., Ltd.

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1 Models of SiC coated covering material PERMA-KOTE®

Image	Part Number	Price (excluding tax)	Electrical resistivity	Hardness	Film thickness	Bending strength	Decomposition temperature	Young's modulus	Bulk density
	PERMA-KOTE®	Available upon quote	0.2Ω・m (by voltage drop method)	2,800HK	The standard is 120μm, but it can be adjusted in the range of 20~500μm.	170 MPa (by 3-point bending)	2,700℃ or higher	320 GPa (by deflection method)	3.2 Mg/m3

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About Company Handling This Product

Toyo Tanso Co., Ltd.

Japan

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SiC coated covering material PERMA-KOTE® Toyo Tanso Co., Ltd.

About This Product

■Features

■Usage examples

1 Models of SiC coated covering material PERMA-KOTE®

PERMA-KOTE®

Other products of Toyo Tanso Co., Ltd.

About Company Handling This Product

SiC coated covering material PERMA-KOTE®
Toyo Tanso Co., Ltd.