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Film thickness distribution measuring device FiDiCa® W series web inspection model-JFE Techno Research Co., Ltd.

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Equipment size

Measurement film thickness range

Measurement speed

Measurement width

Repeatability

Spatial resolution

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  • Part Number

    FDC-W2520

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Film thickness distribution measuring device FiDiCa® W series web inspection model FDC-W2520's performance table

Image Price (excluding tax) Equipment size Measurement film thickness range Measurement speed Measurement width Repeatability Spatial resolution
Film thickness distribution measuring device FiDiCa® W series web inspection model-Part Number-FDC-W2520 Available upon quote W320×D220×H850mm 100nm~20μm *Depends on material and conditions. Approximately 20 lines/second *Depends on material and conditions. 100mm *Depending on the target object, a wider range of applications is possible. 3σ<1.0nm *With a calibrated SiO2 film on a 1 μm thick Si wafer. 0.13mm

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