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  2. ICP plasma source COPRA
  3. LS Copra (1E-1mbar)
ICP plasma source COPRA-Sputtering Components Japan Co., Ltd.

LS Copra (1E-1mbar) | ICP plasma source COPRA
Sputtering Components Japan Co., Ltd.

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Center of motion area

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Vacuum degree (mbar)

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  • Part Number

    LS Copra (1E-1mbar)

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ICP plasma source COPRA LS Copra (1E-1mbar)'s performance table

Image Price (excluding tax) Center of motion area Process Vacuum degree (mbar)
ICP plasma source COPRA-Part Number-LS Copra (1E-1mbar) Available upon quote 1E1Pa PECVD 1.00E-01

There are 7 models for this product.

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Sputtering Components Japan Co., Ltd.

  • Japan

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