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ICP plasma source COPRA-Sputtering Components Japan Co., Ltd.

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  • Part Number

    RS Copra

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ICP plasma source COPRA RS Copra's performance table

Image Price (excluding tax) Center of motion area Process Vacuum degree (mbar)
ICP plasma source COPRA-Part Number-RS Copra Available upon quote 1E1Pa PECVD 1.00E-01

There are 7 models for this product.

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