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■Product name binary gas bar ■Gas distribution ±1.2% or less ■Features One inlet branches into 1/2 and 1/2, and gas is ejected uniformly from all outlets. The reactive split gas is installed on the back side of the integrated Ar gas, mixed by the gas cover, and ejected into the chamber. ■Application Recommended when building a closed loop such as PEM, or when the chamber is uniformly exhausted. ■Disadvantages Gas cannot be adjusted for each outlet.
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BGMAProduct
Rotary cathode gas barHandling Company
Sputtering Components Japan Co., Ltd.| Image | Price (excluding tax) |
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Available upon quote |
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