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Rotary cathode gas bar-Sputtering Components Japan Co., Ltd.

Price (excluding tax)

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Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response


Model Description

■Product name binary gas bar ■Gas distribution ±1.2% or less ■Features One inlet branches into 1/2 and 1/2, and gas is ejected uniformly from all outlets. The reactive split gas is installed on the back side of the integrated Ar gas, mixed by the gas cover, and ejected into the chamber. ■Application Recommended when building a closed loop such as PEM, or when the chamber is uniformly exhausted. ■Disadvantages Gas cannot be adjusted for each outlet.


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  • Part Number

    BGMA

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Rotary cathode gas bar BGMA's performance table

Image Price (excluding tax)
Rotary cathode gas bar-Part Number-BGMA Available upon quote

There are 3 models for this product.

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About Company Handling This Product

Response Rate

100.0%


Response Time

9.6hrs

  • Japan

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