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Price (excluding tax)
Response Rate
100.0%
Response Time
9.6hours
Fast Response
For stationary board The internal magnetic bar swings from side to side like a swinging fan. By arranging multiple cathodes, we simultaneously achieve a distribution of less than ±1% on a stationary board and a usage efficiency of more than 70%, which is the advantage of rotary cathodes.
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Compatible target length
Dedicated motor and belt
Fully cantilevered
Horizontal/vertical mounting
Magnet angle
Maximum input power
Part Number
Swing CathodeHandling Company
Sputtering Components Japan Co., Ltd.Image | Price (excluding tax) | Compatible target length | Dedicated motor and belt | Horizontal/vertical mounting | Maximum input power |
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Available upon quote | Up to 4,000mm | Include | Both possible | 200kW at DC/ 80kHz at MFAC |
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Response Rate
100.0%
Response Time
9.6hrs