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For small boards By replacing the target flange, it is possible to mount both a small diameter target with an inner diameter of 80 mm and a standard inner diameter target with an inner diameter of 125 mm.
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Compatible target length
Dedicated motor and belt
Fully cantilevered
Horizontal/vertical mounting
Magnet angle
Maximum input power
Part Number
CMHandling Company
Sputtering Components Japan Co., Ltd.Image | Price (excluding tax) | Compatible target length | Dedicated motor and belt | Fully cantilevered | Horizontal/vertical mounting | Magnet angle | Maximum input power |
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Available upon quote | Up to 1,000mm | Include | 750mm allows up to 45kg | Both possible | 360 degrees freely adjustable | 20kW at DC/ 80kHz at MFAC |
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Response Rate
100.0%
Response Time
9.6hrs